光学自适应微镜的设计与制造工艺

【作者】 裴旦；

【导师】 白剑；

【作者基本信息】 浙江大学 ， 光学工程， 2006， 硕士

【摘要】 自适应光学系统制造困难,这其中最复杂,也最具有代表性地部分是变形镜。用传统方法制作变形镜成本很高,现在出现一种值得重视的发展趋势是采用光刻和微机械技术来制作变形镜,这样可使变形镜的制作成本大幅度降低,生产效率大大提高。随着微光机电技术(MOEMS)的发展,单元尺寸为微米级的微变形镜阵列的制作已成为可能。 本文分析了用基于MOEMS的可控微镜阵列瞬时校正波前,以实现体积小、重量轻、功耗低的抗高速AO效应微光学自适应系统。设计了其中的关键单元,即自适应微反射镜阵列(AMD),并重点对AMD的微加工工艺进行了实验研究。 第一章介绍了MEMS的主要工艺以及应用;第二章介绍了微反射镜阵列的工作原理,并根据原理制定微镜的结构和选择微镜的材料;第三章重点介绍了微镜阵列的工艺流程:先由双面抛光硅片生长SiO2膜,然后利用L-Edit进行镜面和电极的掩模设计,接着通过光刻显影、对光刻胶的反应离子束刻蚀、对SiO2的氢氟酸刻蚀、对硅基底的湿法刻蚀、溅射铝膜,最终制造出了微镜阵列。第四章利用激光数字波面干涉仪对微镜曲率的形变量作了测试,得出微镜的焦距变化范围。第五章是对于本课题的总结,提出了还需要解决的问题,并对微镜的应用前景作了简要的阐述。 最终制得了4×4的微镜阵列,每个微镜单元大小为3mm×3mm。实验测得该微反射镜工作电压仅需0～2.2V,可调焦距范围为f=∞～0.11m。更多还原

【Abstract】 There are hard restrictions on the application of adaptive optical technology which are caused by the difficulty and high cost in conventional way of deformable mirrors fabrication. With the development of micro-opto-electro-mechaning system (MOMES), it has been possible to fabricate deformable micro-mirror array which is measured in micrometer.Micro-optical adaptive system based on MOMES was analyzed, which is mainly composed of phase controllable micro-mirror array for correcting wave front. It has advantage of compact, light weight and low power consumption and it is very favorable for resisting atmospheric turbulence. Key component, i.e. Active Mirror Device (AMD), was designed.In the 1st chapter, we introduce the main technics and the application of MEMS. Introducing the theory、 setting down the structure and choosing the material of AMD are the main points of chapter2. In chapter3, we focus on the flow of the technics. At first, we plate SiO2 on to the Silicon, then design the masks of the AMD and the electrode, after that we produce the AMD through exposal、 etching and plating. We test how much movement can the micro-mirror does by using the MODEL SPG-II DIGITAL LASER WAVEFRONT INTERFEROMETER. We put forward some problems which we still can’t resolve in the last chapter. All these provided a feasibility basis for the further study of AMD in future.Finally, we get the Micro-Mirror-Array(4x4), and each unit is 3mmx3mm. Through the experiment, we know that the AMD can work from 0~2.2V, and its focus is range from 0.11m to infinite.更多还原