【作者】 黄亮；

【导师】 余晓芬；

【作者基本信息】 合肥工业大学 ， 测试计量技术及仪器， 2006， 硕士

【摘要】 微动工作台是微机械系统的重要组成部分,是实现高精度定位的关键部件。目前在微动平台驱动方式中,用传统的机械式驱动,工作台行程大,但精度一般较低:用压电陶瓷驱动器驱动,工作台定位精度高,但是行程却很小,且上述两种常用方法均为接触式驱动。本论文研究了一种新的用于六自由度工作台驱动单层结构的驱动方式,其能够实现毫米量级的驱动行程,和亚微米量级的定位精度。 本课题来源于国家自然科学基金资助项目“纳米三坐标测量机关键技术研究”,归纳起来,本论文的主要内容及研究成果如下: 一、研究了电磁引力与电磁斥力驱动方式的可行性,研制了电磁力驱动特性研究的试验装置。 二、研制了电磁斥力驱动的控制系统,完成了控制电路等的硬件系统设计、制版、调试与系统的软件编制。 三、研究了电磁斥力驱动的控制算法与减小磁滞影响的“抗磁滞”驱动方法,获得了良好的驱动效果。 四、在实验研究的基础上,设计了单层结构电磁斥力驱动的六自由度微动工作台。更多还原

【Abstract】 The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning. Among the worktables driven by the modes at present, the ones driven by the traditional mechanical mode possess large measuring range but low accuracy and driven by the piezoelectric ceramics driver possess high accuracy but small measuring range. The two modes both belong to contact mode. The paper study a new driving mode in worktable of single-level structure of 6-DOF which possess measuring range of millimeters and accuracy of submicrometer.The research is based on the project sponsored by the National Natural Science Foundation of China(NSFC). To be summarized, the main contents and the research results of the paper are as below:1. Studied the feasibility of the modes of electromagnetic attraction and repulsion. Designed the testing devices driven by the mode of electromagnetic attraction and repulsion.2. Developed the control system of the devices by the mode of electromagnetic repulsion. Finished the design, PCB and debugging of the hardware and the software programming.3. Studied the control algorithms in the mode of electromagnetic repulsion. Developed the anti-hysteresis method in voltage control and achieved good effect by using the method.4. Designed the micro-motion worktable of 6-DOF by electromagnetic driver on the base of the research of experiments.更多还原