【作者】 林敬国；

【导师】 吴博达；

【作者基本信息】 吉林大学 ， 机械制造及自动化， 2005， 硕士

【摘要】 泵作为流体传输系统的关键部件,如今已经历了数千年的发展和演变,其种类和形式繁多,被广泛的应用到各个与流体有关的领域。压电泵是伴随着新型材料、新机构、新驱动器不断涌现而出现的一种新型泵。同传统泵相比,压电泵具有结构简单、体积小、重量轻、耗能低、无电磁干扰,其输出性能易于控制等优点。本文在总结前人工作的基础上提出了一种新结构被动阀压电泵—整体开启阀压电泵。通过理论分析与实验相结合的方式对影响压电泵性能的各组件进行了探讨研究。试制了整体开启阀压电泵样机,进行了相关的实验测试与分析。本文具体研究内容如下: 1. 给出压电振子振动基本假设及定义,运用薄板振动理论及压电学相关知识,导出压电振子谐振频率求解公式。仿真求解PZT4 复合压电振子振动模态。2. 对压电振子变形量进行实验测试,选择适合压电泵工作合适的驱动激励电源信号。3. 探讨适合压电泵的被动阀设计准则,分析不同结构被动阀对压电泵输出性能的影响,论述整体开启阀的优势。4. 探讨泵在一个工作周期内的工作过程及在这一过程阀片的状态。分析阀片开启驱动力的形成及影响因素。5. 通过大量的实验测试,探讨分析驱动电源电压、工作频率、压电泵固定腔体体积大小和进出口径大小等因素对整体开启阀压电泵输出特性的影响规律。更多还原

【Abstract】 In the past decade . MEMS got a lot of progress. Micro-fluid system as an important part of MEMS has made a rapid progress. Micro-pump is the key part of micro-fluid system. Its development indicates the level of Micro-fluid system; So that made it get extensive focus. In practical life ,it is necessary to develop a kind of micro-pump in many fields that can be used to transmit small fluid: chemistry analysis and testing、bioengineering、medical treatment、integrate circuit chip、micro-accessory and micro production system etc. Piezo-pump, new kind of transmitting liquid device , is an important application branch of piezoelectric drive whose power is anti-piezoelectric–effect of piezoelectric ceramic. More than ten countries and regions in all over the world, there are research institutions of piezo-pump. With many merits such as simple structure, small body, no interfering of electromagnetism and good output ability under low applied voltage etc, the piezoelectric pump has very extensive application prospects in the fields of chemistry analysis, medical treatment and bioengineering etc. People has studied and developed piezo-pump for more twenty years,many different structures of it has been made ;such as from piezoelectric actuated peristaltic pump to pies-acoustic pump 、from single-chamber pump to multi-chamber pump、from valve piezo-pump to valveless pump、from check valve piezo pump to active valve pump. In this paper, a new kind piezo-pump with check valve was put forward ( integral valve pump) . 1. Introduction Introducted the status of study about piezo-pump at home and abroad, showed the structure’s characters and working principle. The trends of piezo-pump’s development were analysed: High output pressure、High flow rate、Micro-structure、Low power consumption. At present ,there are somethings to be done: reappearance of output、long life and simple using method . 2. The research on the characteristics of the piezoelectric bimorph Piezoelectric bimorph , pump’s drive device, is one of the key part of piezo-pump, whose capability determined the pump’s output performance . So it’s necessary to study it’s ability deeply. In this chapter, piezoelectric effect 、anti-piezoelectric effect 、performance parameters and piezo-driving principle were presented. The geometry equation and constitutive equation of piezoelectric bimorph. is educed by using the sheet vibration theory and the related piezoelectric knowledge. At the same time ,the approximate compute for engineering was given by Rayleigh-Ritz. 3. Experiments on the piezoelectric bimorph After the testing of deformation, the following conclusions were drawn: The deformation of piezoelectric bimorph is affected by wave of power supply. Rectangle wave can make biggest deformation, sina wave is bigger than triangle wave .Base on the noise :Rectangle wave is worst, sina wave is better than triangle wave. Taking the two reasons into account ,sina wave power supply was accepted. In anthother way ,the frequency of power supply affect the deformation of piezoelectric bimorph too. The stronger of restrict ,the lower of resonance of piezo-bimoph. When restrict is free, the resonance is 3.1kHz, two points was restricted ,the resonance is 2.66kHz, the whole edge was restrict, resonance 2.1kHz 4. Study on characters of integral valveValve made liquid flow to single direction .Piezo-pump with the same piezo-bimorph ,different valves’structure or with different capability’s valves ,which may have different output .So ,valves are the key part of piezo-pump too. Valves were divided into checked valves and active valves according to whether there is power supply when valves are working . Base on working principle , the checked valves were separated into several forms. Integral valve is one of checked valves. The rule for designing checked valve is put forward after studied the working principle of checked valve: (a) The part between checked valve and fixing part ,whose elasticity is moderate;(b)The checked valve has no turn in normal working frequency. Vibration’s lagging of valve was discussed through the analysis on working course in a cycle and proved it by experiment ,then it successfully explained the phenomena that flow rate fall when the frequency increase 5.Experiment on piezo-pump with integral valve Pump sample was made (Figure I ) .According to output capacity ,work efficiency was defined. Base on results of testing ,many factors which are influential on pump’s output capacity are found. The rule which the voltage of power supply affect pump’s output pressure、flow rate and self-priming are the same. They all increase when voltage become strong with good linearity. This更多还原