【作者】 刘志勇；

【导师】 袁清珂；

【作者基本信息】 广东工业大学 ， 机械设计及理论， 2005， 硕士

【摘要】 本文主要研究高亮度LED(Light Emitting Diode,发光二极管)芯片制造工艺的知识挖掘技术,在综述国内外知识挖掘和粗集理论研究与应用的基础上,通过对高亮度LED芯片制造过程的分析与研究,提出了基于粗集理论的高亮度LED芯片制造工艺知识挖掘系统的体系结构,研究了高亮度LED芯片制造工艺知识挖掘的基本原理与实现方法,并且开发了一个具有数据输入、信息查询和知识挖掘等功能的原型系统。具体研究内容包括: 1)分析了高亮度LED芯片制造工艺知识挖掘的研究意义,LED芯片制造工艺复杂,对工艺控制和改进需要很长的经验,通过对现有生产数据的挖掘分析有利于提高LED芯片的生产效率、优化工艺过程,提高产品性能。综述了知识挖掘、粗集理论的国内外研究现状,并概述了高亮度LED芯片的设计与制造技术。通过这些分析,确定了本文的四个工作重点。 2)研究了基于粗集理论知识挖掘的基本原理。讨论了连续属性的离散化、粗集理论基本概念的运算、相对约简和相对核、属性的依赖性以及属性的重要性这些知识挖掘中运用到的概念和方法,并对基于粗集的约简进行了分析。 3)为了更好地设计高亮度LED芯片知识挖掘系统,研究了高亮度LED芯片的制造过程,分析了研磨、去蜡清洗化学抛光、金属蒸镀、光刻、腐蚀工艺、合金和切割等大部分LED芯片制造技术。 4)在对基于粗集理论知识挖掘技术和高亮度LED芯片制造工艺大量分析研究的基础上,研究了高亮度LED芯片制造工艺知识挖掘的基本原理与实现方法,并对ICP(Inductively Coupled Plasma,感应耦合等离子体)等离子体刻蚀工序中部分工艺条件对刻蚀速率的影响进行了计算分析,结果证明本文所提出的基于粗集理论的知识挖掘方法在高亮度LED芯片制造工艺的知识挖掘是适用的。更多还原

【Abstract】 In this paper, the most research work focused on the knowledge discovery technology for the manufacture process of HB-LED (High Brightness Light Emitting Diode) chip. Through analyzing and researching the manufacture process of HB-LED chip, the architecture of Rough Sets based knowledge discovery system for the manufacture process of HB-LED chip was proposed, the fundamental principles and the realizing methods were studied, and a prototype system by which operator can input data, retrieve information about HB-LED chip process and discover knowledge was developed. The main work of this paper contained:1) It analyzed the researching significance of knowledge discovery for the manufacture process of the HB-LED chip. For its complex process, to control and promote the process of the HB-LED chip needed rich experience about it. The discovery and analysis of the current manufacture data helped to promote manufacture efficiency, optimize process and improve product performance. The overseas and home research situation about knowledge discovery and Rough Set, design and manufacture technology about HB-LED chip were summarized. Finally, four main tasks of the paper were determined.2) It studied the fundamental principle of the Rough Set based knowledge discovery. The concepts and methods which would be used, such as the discrete methods of the continuing attributes, the operation of Rough Set basic concepts, the relative reduction and relative core, the dependability and significance of attributes were discussed, and reduction based on Rough Set was also analyzed.3) In order to better design the knowledge discovery system for the HB-LED chip, the manufacture process of the HB-LED chip was researched.更多还原