【作者】 杨忠高；

【导师】 于兆勤；

【作者基本信息】 广东工业大学 ， 机械制造及其自动化， 2005， 硕士

【摘要】 随着光学与微电子学等技术的不断发展,对其中关键零件表面精度的要求越来越高。近年来集成电路的规模越来越大,其所用芯片的特征尺寸越来越小,为保证后续加工的质量,对表面精度的要求是非常严格的。而现代短波光学和强光光学系统,对器件表面精度的要求则更为苛刻,不仅要求表面粗糙度低,而且对表面损伤程度也有严格的要求。在另外的一些技术领域,如高密度磁记录器件和光记录器件等的制造方面,也存在着对超光滑表面的需求。 本文针对超光滑表面的需求,提出了一种基于流体二维振动的超光滑表面加工方法。该抛光方法采用流体为抛光工具,在水平方向和垂直方向附加二维高频振动作为抛光作用力,使流体分子或微细磨料粒子能以一定的速度不断冲击工件表面,利用抛光液与工件之间的物理-化学作用完成材料去除,从而获得超光滑表面。论文基于该原理,对实验装置进行了设计,并通过有限元模态分析方法分析了装置的固有频率和模态振型。本文还对装置进行了有限元谐响应分析,找出在激振器的作用下抛光槽的响应状态,找出了响应比较好,振动状态平稳的频率段。 通过实验发现不同的流场状态以及工件的安装方式对抛光表面质量有着重要影响。实验观察到在稳定流场中,工件采用水平安装方式时,工件表面存在凹坑等缺陷:采用垂直安装方式时,抛光后得到的工件表面比较光滑。而在非稳定流场中,采用水平安装和垂直安装方式都发现了凹坑等缺陷。采用区域跟踪检测来评价加工的效果,验证了流体二维振动抛光方法的有效性和可行性,并总结相关规律。 抛光的时候振动体中流体振动场的振动状态对于加工效果有着很大的影响,本文采用有限元方法对二维高频振动下的振动体进行流固耦合分析,分析了该振动场中流体的运动轨迹和规律。同时对单个磨料粒子在二维振动耦合作用下的轨迹也进行了仿真,以研究抛光加工的机理。更多还原

【Abstract】 With the development of microelectronics and optics, the requirement for the surface precision of key components is increasingly stricter. In recent years the scale of the integrate circuit become larger and larger, the feature size of wafer has become much smaller, to guarantee the quality in following process, the demand to surface precision of wafer is very serious. In modern shortwave optics and highlight optics systems, it is very severe for the surface precision of components, the surface roughness is demanded to be very low and without any surface damage. In other fields of technology, such as high dense magnetism record component and light record component, the ultra-smooth surface is also necessary.In this paper, a novel polishing technique based on the two-dimension vibration of fluid is put forward. It uses a liquid to replace a polishing pad and supply two-dimension high-frequency vibration as a power of polishing. Under the two-dimensional vibration, the fluid and abrasives impact workpiece continuously. The material can be removed by the physical-chemical action between slurry and workpiece, and the ultra-smooth surface can be obtained. Based on this way, an experimental equipment has been designed and harmonic analysis are done with finite element method. According to Mode analysis, the nature frequency and vibration mode are obtained. The frequency of vibration is found from harmonic analysis, at which the respond of trough to vibration exciter is best.In polishing, the vibration state of fluid field and the way that workpiece is fixed has important effect on surface quality. It is observered that, in a stable fluid field, when workpiece is fixed flatly in polishing, some flaws such as concaves are found. However, when workpiece is fixed vertically, the smooth surface is obtained. In a unstable fluid field, some flaws such as concaves are found when workpiece are fixed flatly and vertically respectively. Region-track measure method is employed to evaluate the polishing result, and some polishing rules are presented.更多还原