【作者】 杨林杰；

【导师】 高殿荣； 韩德才；

【作者基本信息】 燕山大学 ， 机械电子工程， 2005， 硕士

【摘要】 微流体技术(Microfluidics Technology)是指在微观尺寸下控制、操作和检测复杂流体的技术,是在微电子、微机械、生物工程和纳米技术基础上发展起来的一门全新交叉学科,其中微泵是微流体系统主要的基本组件之一。 本论文主要对压电驱动无阀微泵进行了理论分析,建立了扩散管/收缩管模型的基本方程和压电驱动微泵薄膜变形模型,通过 ANSYS 软件模拟计算微泵膜片形变和无阀微泵三维流动流场。 初步建立扩散/收缩流道结构的数学模型,讨论了结构参数的选取原则及相应的流动阻尼系数的计算方法。通过 ANSYS/FLOTRAN CFD 模块对扩散/收缩流道进行有限元分析,得出流道内流体的速度和压力分布情况,以及结构参数变化对流道内流体流动情况的影响曲线;建立了压电驱动微泵膜片的有限元分析模型,采用直接耦合法模拟分析了微泵膜片在压电层驱动下产生的形变和速度变化,得出了膜片厚度、形状和压电驱动电压对微泵膜片形变的影响曲线,并对压电驱动微泵膜片进行了模态分析,计算出微泵膜片的固有频率;应用 ANSYS 有限元流固间接耦合分析建立无阀微泵三维流场模型,得出泵腔内压力云图和速度矢量图,从而较为全面的认识了无阀微泵系统的流动特性。 研究成果为压电驱动无阀微泵结构设计提供了理论依据,对于微泵结构的合理化设计具有重要的参考价值。更多还原

【Abstract】 Micro-fluidics technology (develop on the base of micro-electronics, micro mechanics, biology engineering and nanometer technology) is defined as technologies focus on controlling, manipulating and inspecting complex fluid under micro-scale. As an important branch of Micro-electro-mechanical System (MEMS), it is much quicker and cheaper to utilize than the current technology and has been applied in many fields, among them the micro-pump is the most important one of basic equipments. This research mainly focus on the theoretical analysis to the micro-pump, the fundamental equations of diffuser/nozzle model and piezoelectricity actuate micro-pump membrane deformation model were constituted, then the analog computation was done to micro-pump membrane deformation model and the three dimensional flow field of the valve-less micro-pump through the ANSYS software. First the mathematical model of the diffuser/nozzle was built, the principle of choosing the structure parameters and corresponding computation methods of the damping coefficient were discussed. Then through the finite element method analysis to the flow channel by the software of ANSYS/FLOTRAN CFD, the velocity and pressure distribution and influence curve of flow arose by changing the structural parameters were got; and after formatting the finite analysis model of the micro-pump membrane, the membrane deformation and change in velocity was analyzed by the finite element direct coupling analysis, and on the basic of the analysis the membrane deformation curve arose by thickness, shape of itself and actuated voltage as obtained, then the modal analysis to the micro-pump membrane was done, the inherent frequency was computed out; the three dimensional flow field model of the valve-less micro-pump was constructed by the finite element indirect coupling analysis and the pressure contour and velocity vector graph was obtained, on the basic of former result the flow characteristic of the micro-pump system can be recognized. The research result can be used to make the design of the micro-pump more reasonable.更多还原