稀土铁石榴石薄膜的制备及磁光性能测试

【作者】 张宇峰；

【导师】 张溪文；

【作者基本信息】 浙江大学 ， 材料学， 2005， 硕士

【摘要】 在高速、大容量单模光纤通信系统中,波分复用技术已被广泛采用,光纤光隔离器成为不可缺少的关键器件。从材料科学研究的角度来看,必须设法提高作为隔离器核心的磁光材料的性能。由于掺Bi稀土铁石榴石在可见及近红外区能显著地增强磁光效应,且具有小的光吸收损耗及优异的物理、化学性能,被公认为是极具应用前景的第二代磁光材料。本文的综述部分首先介绍了稀土铁石榴石材料的结构、性能和研究情况。然后介绍了磁光材料的磁光效应、性能测试和分类。接着介绍了磁光材料的应用,列举了各种磁光器件。最后介绍了离子束辅助沉积技术及其应用。本文采用离子束辅助电子束沉积的方法,把ICP离子束辅助装置和电子束蒸发系统结合起来,在基片上蒸镀单纯YIG、Bi掺杂YIG和Ce掺杂YIG,开辟了一种新的化合物制备方法,并获得专利。蒸发沉积过程中通氧气,可以让多元化合物的氧缺失得到补充,更容易形成氧化物。在有氧环境下,薄膜表面虽然因为受到氧离子的冲击而变得粗糙,但同时也让沉积物中生成的结晶颗粒更多更大。氧的参与让各组分比例更接近原始配比,特别是掺杂成分含量明显提高。证明了IBAD方法可以用于制备Bi、Ce掺杂稀土铁石榴石薄膜。本文使用自行搭建的可见/红外磁光旋转测试装置,对不同条件下制备的铁石榴石材料进行深入的测试和分析。测试结果显示,采用液相外延法制备的YBiIG/YbIG复合稀土铁石榴石薄膜的磁光性能最佳,磁光效应最明显。其次是用共沉淀法制备的Bi-YIG/环氧树脂磁光复合薄膜。而离子束辅助电了束蒸发制备的Bi-YIG则暂时无法测出磁光效应。该装置已经成为实验室重要的测试工具,它可选用633nm氦氖激光器、1310nm/1550nm波长的半导体激光器,信号放大倍数为150倍,并有抗干扰功能。仪器配有变温测量装置和计算机数据处理程序,测量精度0. 01度,可用于测量10-80℃三种波长范围内连续温度区间的磁光材料的法拉第旋转角。更多还原

【Abstract】 With advances of optical communication and information processing system, extensive investigations on magneto-optical materials and devices have been carried out. Optical isolators are indispensable in these systems. From the point of view of materials science research, The capabilities of magneto-optical materials as the core of optical isolators should be improved on. Bi-substituted magneto-optical materials, have attracted much attention due to their strong enhance MO effects, small absorption loss and high physical-chemical stability.The review part firstly described rare-earth iron garnet’s structure, properties, the development process, and the preparation techniques. Then introduced the MO effects, capability testing, classes, application of magneto-optical materials. It also enumerated magneto-optical apparatus. Lastly it introduced the techniques and application of ion beam assisted deposition.The thesis research accomplished the growth of YIG, Bi:YIG and Ce:YIG rare-earth iron garnet with ion beam assisted deposition (IBAD) system on Si substrate. The IBAD system combined inductively coupled plasma (ICP) source and electron beam deposition It is a new method to produce magneto-optical films, and obtained a patent. By depositing with oxygen, the lack of oxygen in the polyatomic compound has been reinforced. So it was easier to form oxide. With oxygen, the surface of films coarsened by oxygen ion beam impacting. The crystal grains become bigger and more in the deposition. The proportion between components approached original proportion, especially in the impure components. It proved the availability of IBAD method in growing Bi:YIG and Ce:YIG rare-earth iron garnet films.In the thesis, Faraday rotation spectra have been measured on rare-earth iron garnet samples by using three different methods with the visible/infrared FR test apparatus using the magneto-optic modulated double-frequency method. The result indicated that the magneto-optical properties of YbilG/YbIG bi-layer films are grown on GGG substrate by LPE method was the best of the three conditions. And Bi-YIG and epoxy magneto-optical hybridized films by coprecipitation was take second place. ButThe Bi-YIG depositing by IBAD method couldn’t discover MO effect. The apparatus has become one of the most important testing tools in the laboratory. It could choose 633nm He-Ne laser or 1310nm/1550nm semiconductor laser as lamp-house, the amplificatory effect reached 150 multiple, with anti-jamming function. The apparatus also appended temperature changing test apparatus and computer data processing programs. The Faraday rotation repletion precision reached 0.01° at the wavelength of 633nm, 1310nm and 1550nm in 10~80℃更多还原