【作者】 雷伟；

【导师】 朱大庆；

【作者基本信息】 华中科技大学 ， 物理电子学， 2004， 硕士

【摘要】 光开关作为新一代全光光网络的关键器件,在实现光层面上的路由选择、波长选择、光交叉连接和自愈保护等方面有着广泛应用。聚合物热光光开关由于具有制作工艺简单、开关性能良好、消耗功率低等特点,世界各大通信器件公司均已对其开展了大量的研究开发工作。本文的主要工作围绕聚合物热光光开关的重要组成部分——热电极展开,设计优化了具有矩形电极结构的热光光开关,提出了弧形电极的概念,并与矩形电极进行了比较,研究了制作工艺误差对开关性能的影响。具体包括以下内容:首先,简单讨论了热光效应和Y分支型热光光开关的工作原理,并简单介绍了热电极设计的基础——热传导理论。其次,介绍了几种常用的热光系数测量方法,详细叙述了利用棱镜耦合仪测量聚合物热光系数的过程,并精确测量了聚合物材料的热光系数,为光开关热电极的设计打下了基础。接着,确定了光开关热电极和引线的材料,并根据开关时间、金属电极产生的损耗以及波导-光纤之间的耦合效率与光开关结构上覆盖层的厚度之间的关系,确定了上覆盖层的厚度。最后,对具有矩形电极的光开关结构进行了优化设计,提出了弧形电极的概念,并与矩形电极进行了比较。跟据金属薄膜电阻率理论,计算出了电极的厚度。研究了电极宽度误差、掩模套刻误差、电极厚度误差等工艺误差对开关性能的影响以及光开关的波长响应特性。由于热电极结构直接决定了热光开关的性能,本课题的研究为制作高性能的热光开关打下了基础,具有重要的实用价值。更多还原

【Abstract】 Optical switch plays a key role in the coming new-generation optical networks. It has a wide application in router switching, wavelength switching and network protection on optical level. Polymeric thermo-optic switch has been attracted much attention in recent years due to its advantages including easy manufacturing, good performance and power saving. This thesis presented our research work on an important component of the polymeric thermo-optic switch, the heater. And the thesis is organized as the following consequence.Firstly, we briefly discussed the thermo-optic effect and the mechanism of Y-branch thermo-optical switch. And then the foundation of heater designing, the theory of heat conduction is introduced.Secondly we interpreted several methods to measure the thermo-optic coefficient. Among them we discussed the method of using prism coupler in greater details. Based on this method, we also measured the thermo-optic coefficient of polymer, which is an important parameter for heater designing in optical switch. And then, we determined the material of heater and electrode in optical switch and also decided the thickness value of the up-cladding according to the relationship among thickness of up-cladding, switching time, the attenuation produced by metal material as well as the coupler efficiency of waveguide and optical fiber.Finally, we designed two heater structures, namely rectangle heater and arc heater, and then calculated the thickness value of heater. We also discussed the performance of switch due to the manufacture error,such as width and thickness error of heater, overlay error of mask. The performance of switch due to the change of wavelength is also discussed.更多还原