【作者】 朱迅；

【导师】 傅建中； 陈子辰；

【作者基本信息】 浙江大学 ， 机械制造及其自动化， 2004， 硕士

【摘要】 微流控芯片系统已成为目前分析仪器发展的重要方向与前沿，微流控芯片技术的发展，需要先进的微制造技术为后盾。 本课题是国家863项目《面向微流控芯片的微模具制造装备研究》的重要组成部分，本文的研究工作围绕CO₂激光烧蚀加工微流控芯片的原理展开，具体分析了激光加工的特点，数控系统的组成和用户界面的设计，从聚合物材料特性和激光加工参数选择两个方面对实验研究进行详细论述。CO₂激光烧蚀加工微流控芯片加上方法可以避免传统的微电子工艺制造微流控芯片的局限性，同时解决当前微流控芯片制造工艺的高成本问题，研究低成本批量制造技术，为微流控芯片技术研究与产业化奠定基础。 全文内容安排如下： 第一章是绪论部分，在综述国内外微机械系统（MEMS）发展概况的基础上，介绍了激光加工技术在微加工领域的应用现状，归纳出了聚合物微流控芯片加工的关键技术，提出本学位论文的研究内容。 第二章分析比较聚合物微流控芯片的几种加工方法，同时对准分子激光和CO₂激光加工聚合物PMMA时的特性进行比较。最后重点论述了CO₂激光烧蚀加工的原理和特点。 第三章从分析PMAC多轴运动控制器的特点和功能着手，详细阐述了基于PMAC的CO₂激光加工数控系统组成，同时介绍了PMAC控制的三轴联动和PID参数的调整。 第四章是本论文的重点内容，提出面向对象模块总体设计，对其中的控制中心模块、仿真控制模块和运动控制器模块进行详细的分析。重点介绍了这些模块的类实现，给出了模块的主要属性和功能接口。最后，详细介绍了PEWIN模块的功能实现。 第五章介绍了微流控芯片加工的检测仪器与设备，功率测量仪和微机械旋转体视显微检测系统。同时对实验结果从激光功率与流道深度的关系，冷却时间与流道深度的关系，流道深度、宽度与加工回程次数的关系和十字型流道的试样分析四个方面进行详细论述。 第六章对本学位论文进行了总结，并对今后激光微细加工技术的发展做了展望。更多还原

【Abstract】 Microfluidic chip systems have recently entered the forefront of instrumention development in analytical chemistry and become the main direction , additionally, the development of microfluidic chip analytical systems is based on the advanced micromachining technology.As a key item of national 863 project named the research on micro-mould machining equipment of microfluidic chip, this paper discribles the principle of CO2 laser ablation, developes a effective method for laser micro-machining technique. Polymer properties and laser processing parameters is key factors to influence final processing result. In this paper above two aspects have been mainly researched, microstructure fabrication and NC software of laser system. CO2 laser ablation is a good alternative to traditional microelectronics fabrication method, microfluidic systems can be produced rapidly and inexpensively , so it becomes the hot topic of microfluidic chip research.The paper content releases as follows:Chapter 1 is the introduction of this dissertation, An overview is given on the history characters and developments of MEMS. Discuss the application of laser micromachining technology, introduce the key factors and content of the paper.Chapter 2 introduces several methods to produce microfluidic chip, Ablation of PMMA by ultraviolet and infrared lasers is dicussed. The main part of the chapter is the principle of CO2 laser ablation on the PMMA surfaces.Chapter 3 describes the function and property of PMAC, CO2 laser system is discussed, such as the characters > structure and processing. Tree axis synchronous control and PID parameters tuning is introduced at last.Chapter 4 is the main part of this paper, NC software of CO2 laser system are analyzed and designed with object-oriented method. Present the key classes interface.Chapter 5 introduces measurement devices of the laser power sensor and the micromechanism vision check instrument. The topography of the cavities is studied using these instruments.Finally, the research contents of this dissertation have been summarized and the prospect of laser micromachining has been opened up.更多还原