【作者】 田中俊；

【导师】 颜永红；

【作者基本信息】 湖南大学 ， 微电子学与固体电子学， 2003， 硕士

【摘要】 计算机辅助制造(CAM)是指通过直接或者间接把计算机与企业的物力和人力资源联系起来，在生产的计划、管理、控制和操作等方面有效地应用计算机技术。计算机辅助制造应用在集成电路生产制造上就称之为IC-CAM。如果说目前我国集成电路的计算机辅助设计技术同世界先进国家相比存在着多年差距，那么，在制造方面的计算机辅助也同样存在很大的差距。为了实现IC生产的计算机管理，使半导体制造企业提高产品合格率、降低生产成本，通过ISO—9000质量体系认证体系，我国的半导体制造业很有必要应用集成电路计算机辅助制造(IC-CAM)技术。 中科院微电子中心在香港半导体制造公司和清华大学微电子所集成电路生产线上使用的IC-CAM基础上，结合自己半导体芯片生产线的实际情况，与清华大学微电子所合作开发了一套新型IC-CAM系统，对原系统进行了全面的改进与完善。改进后的系统基于C／S和B／S混合结构体系，既实现了网上信息浏览，又做到了整个生产线上数据共享。操作系统分别应用SCO Unix和Linux，数据库采用了ISO标准认证的Oracle数据库，确保了系统数据安全。同时该系统还实现了Oracle、Sqlserver、Foxpro、Access、Excel等多种异构数据库的数据交换。系统函盖了操作、工艺员、调度、质检、设备、库房、报表、外延等8个子系统。客户端采用了Powerbuilder作为界面设计工具，开发了标准的Windows界面，可独立运行于win98，win2000，winxp等不同操作系统。 基于B／S和C／S混合体系结构的IC-CAM系统的开发涉及到Unix、Oracle、Powerbuilder和集成电路制造工艺等多项技术。论文主要论述了局域网内的系统的设计和开发，首先讲述了作为系统支持技术的数据库技术。接着介绍了系统网络特点：C／S和B／S结构，分析了两种结构的优缺点和采用二者并存的必要性。随后详细介绍了系统各部分的特点和功能以及设计的思路和技术。最后在结论中讨论了现有IC-CAM系统的特点和改进思路。系统经过一年的改进和完善，于2003年底投入了试运行，系统功能全部正常，得到生产线工人和工程师们的认可，一致认为，IC-CAM系统的投入使用，必将能提高生产线的效益。更多还原

【Abstract】 Computer-aided manufacturing(CAM) refers to how to use computer technology effectively through direct or indirect combining computer and material resources manpower resources of one enterprise, in such aspect as plan, management, cantonment, operation, etc. When CAM is used in integrated circuit (IC) manufacturing, we call it IC-CAM. At present, both integrated circuit computer-aided design(IC-CAD) technology and integrated circuit computer-aided manufacturing technology in our country are inferior to that of advanced country. If we use IC-CAM system to manage IC manufacturing, our IC manufacture will be advanced. Furthermore, IC-CAM will increase the yield and decrease the cost of the products, and help to gain the certification of ISO 9000 quality system. So it’s necessary that the semiconductor manufacturing enterprise in our country should use IC-CAM technology.Based on the IC-CAM system of Tsinghua’s and HongKang’s IC manufacturing fab, Microelectronics R && D Center ,Chinese Academy of Science designed one new IC-CAM system according its own condition. This new IC-CAM system is based on C/S and B/S mixed architecture, so its data information not only can be browsed in the web but also can be shared in local area network. In the configuration, the ORACLE7.3 DBMS operates with SCO Unix platform at the server end and application programs create with Power Builder kit on Windows98/xp/2000 work at the client end. The system composed of eight- subsystem covers all the departments of the pilot line.The design of the IC-CAM system relates to some technologies, such as Unix Oracle Powerbuilder and the processing of IC manufacturing. This paper begins with an introduction of database technique, Afterwards, it illuminated the client/server and browser/server mix architecture ,Then the design idea and application technologies of the IC-CAM system are analyzed. At last, the characteristics and the results of running the new IC-CAM system are concluded, and some ideas of improving IC-CAM systems are proposed.更多还原