【作者】 曾祥烨；

【导师】 刘剑飞；

【作者基本信息】 河北工业大学 ， 微电子学与固体电子学， 2003， 硕士

【摘要】 表面粗糙度是机械加工中的重要概念，它直接影响到机加工表面的机械性能，因此表面粗糙度的测量与评定一直是机械行业的研究课题。传统的触针式表面粗糙度测量仪虽然有使用方便、测量迅速的优点，但这种方法属于接触式测量，触针的针尖容易划伤被测表面。这使得它的应用受到一定的限制。而各种非接触测量方法中常用的光散射法测量所得的是统计结果，并不能给出物体表面的微观轮廓。本论文提出了一种基于激光强度调制的光纤探针式表面粗糙度测试仪，并制作了实验样机。测量的基本原理是：用一根单模光纤将一束激光垂直照射在被测表面上。在表面轮廓的峰值和谷值处，激光将反射回单模光纤中，接收端将接收到一个光脉冲；而在轮廓的斜面处，激光无法反射回光纤中，接收端将无信号。将单模光纤沿固定高度直线扫描被测表面，接收端将接收到一连串高低不同的光脉冲，脉冲的强度代表了表面轮廓峰谷的高度。由这些脉冲即可恢复出被测表面的轮廓。这种测量方法结合了传统针描法和光散射法的优点，既避免了直接与被测表面接触又可以得到表面轮廓。文中对这一测量方法的实施细节进行了详细的论述，并给出了测量结果，最后给出了改进建议。在实验样机的研制中，运用了虚拟仪器的思想，结合计算机技术，用软件编程实现的仪器结构对采集所得的数据进行处理和显示。这使得系统的功能很容易扩充，增加了系统的灵活性和可移植性。更多还原

【Abstract】 Surface roughness is an important concept in machining and determines the performance of machining surface. Therefore, surface roughness measurement is a important task of machine-building industry. The traditional probe instrument has its own advantages, but it can scratch the surface being measured by contacting it. This limits its application. Among those non-contact method, the light-scattered method is in common use. But it can only provide Stat. result, not the profile of surface.This paper focuses on developing a measuring technology of surface roughness by fiber probe. Let’s see the measurement process: one beam of laser is shot at the surface vertically via a single mode fiber, then at the points of peaks and valleys of the surface profile, the laser will be reflect into the fiber and we will get a laser pulse at the other end of the fiber. If the laser did not shoot at the peaks or valleys, we will get nothing. So, if we scan the surface with the single mode fiber at a fixed height, we will receive a series of laser pulses which have different intensity. With these pulses, we can get back the surface profile. Using this technique, we can not only avoid to contact the surface but also get the surface profile. Much more detail of this technique is discussed in this paper, and result of measurement is given. Finally, further research directions are presented.In the development of prototype, the concept of virtual instruments is fetched in. Data is computed and displayed by instruments which consist of software. This makes the system can be easily extended. The system will be more flexible and transplantable.更多还原