【作者】 余厉阳；

【导师】 杨晓光； 雷永泉；

【作者基本信息】 浙江大学 ， 材料学， 2002， 硕士

【摘要】 本文首先对国内外电致变色薄膜和稀土系薄膜的研究进展进行了评述。在此基础上，着重研究了用直流磁控溅射技术，在真空中，在玻璃、ITO玻璃和Si片等基体上溅射富镧、富铈、La和Y薄膜的可能。分析了稀土系薄膜在低真空条件下制备失效的原因，并对制备的稀土薄膜在反复充放氢过程中结构、电化学性能和光学性能变化进行了研究。 通过反复研究，确定了在实验中采用的磁控溅射系统中制备稀土系薄膜的最佳工艺参数，发现衬底温度150℃，溅射氩气的气压为4.5×10^-1Pa时比较适宜。溅射过程中，不同溅射靶间的相互污染、镀膜过程中的氧化和碳化及Pd层结晶性能的好坏等都对薄膜的性能有很大影响。 对于Pd／Mm薄膜的研究表明，稀土薄膜在电化学充放氢过程中失效的原因是KOH对稀土的腐蚀氧化，氢的电化学氧化和还原均通过稀土薄膜的表面Pd金属层进行，充放氢过程受限于氢在薄膜内部的扩散。 对于Pt／Ml薄膜的研究表明，Pt在稀土表面呈纳米颗粒状，在6M的KOH电解质中进行可逆充放氢，未见膜出现粉化现象，可以替代Pd达到电化学吸放氢的目的。 对于Pd／Y薄膜的研究表明，由于不同激励条件下，稀土薄膜腐蚀氧化的机理不同，在气态充氢的条件下，稀土膜的孔洞在气流的压力下出现自愈的倾向，可以使薄膜出现光学性能的转变，而在电化学充氢条件下，未能发现有光学效应。YH₃并不稳定，在大气中即会放氢，转变为YH₂。YH₃由于禁带宽度的原因，在γ=400nm左右出现吸收限。而YH₂在γ=689nm左右存在红色透明窗。更多还原

【Abstract】 In this thesis, the progresses in the electrochromic films including rare earth films have been reviewed. Based on the review, the preparation of rare earth films on different substrates including glass, ITO glass and Si have been carried out by using magnetron sputtering technique under the vacuum. Furthermore, the reasons for the invalidation of rare earth are analyzed, and the changes in structure, electrochemical properties and optical properties of rare earth are investigated as well.The optimum deposition parameters of films are as follows: substrate temperature of 150 癈 and sputtering pressure of 4.5 X ICT’Pa Ar+. During the sputtering process, the contamination of the different target materials and the oxidation and carbonization and the crystal structure of Pd all have significant influence in the properties of rare earth films.For Pd/Mm films, it is found that the destruction of the films were caused by the erosion and oxidation in KOH solution during electrochemical hydrogen loading. The electrochemical reduction/oxidation process of hydrogen only occurs on the Pd coatings, the limiting step is the diffusion of hydrogen in the inner rare earth film.For Pt/Ml films, it is found that Pt coatings is of island particle structure with 150-200 nm in size. The hydrogen loading/unloading process of the Pt/Ml films can be done in 6M KOH, and the severe embrittlement and cracking of rare earth films cannot be found. It shows that Pd layer can be replaced with Pt layer without the decrease in. protection against air ..For PoVY films, it is found that the corrosion mechanism of the films is different during the varied hydrogen loading process. It is shown that the films exhibits the switchbale optical properties transformation during hydrogen air loading, but show no optical change by electrochemical ways. YH3 can easily be transformed into YH2 in air. Due to the band gap of Y. the absorption edge is found for Y at A =400nm. Furthermore. YHj shows a iVi uansrfiittancc Vv’indc’vV at - - 689nrn.更多还原