【作者】 陈继忠；

【导师】 蒋大文；

【作者基本信息】 四川大学 ， 测试计量技术及仪器， 2001， 硕士

【摘要】 测量仪器的精度和性能受到零件尺寸、形状和位置等几何要素的影响。形状误差是表征零件形状的重要几何要素。直线度作为形状误差的要素之一，直接影响仪器精度、性能和质量。在有些场合，甚至是决定因素。随着科学技术的发展，对产品零件要求微型、精密，因此对小尺寸零件形状误差测量提出了越来越高的要求。而对小尺寸零件的直线度和平面度的测量技术及方法目前较为落后，基于此，本课题选择小尺寸零件直线度测量仪为主要研究对象，对测量原理及方法进行研究。 本文主要论述了基于静压气浮导轨的小尺寸零件直线度测量仪的研究。简述了传统的直线度测量方法，以及国内外当前在静压气浮导轨方面的研究水平。其次，探讨了相关理论基础：静压气浮导轨的基本理论、直线度误差的评定方法。在此基础上，分析论证了本课题的可行性和科学性，通过对小尺寸零件的测量原理、特点和实际测量中的具体要求进行分析和实际调查，提出了该小尺寸零件直线度测量仪的整体结构设计方案，并着重论述了该设计方案中的静压气浮导轨、驱动和软件对测量数据的处理等具体设计方法。最后，使用该方案所设计的测量仪进行实验，并对实验数据结果进行处理和分析，结果表明该小尺寸零件直线度测量系统能满足测量要求，并能提供自动的数据采集和图象分析，给我们今后开发小尺寸零件直线度测量仪提供了一定的基础。更多还原

【Abstract】 The quantity and the capability of the measure instrument are effected geometry element (size, shape, position, etc.) of parts. Error of shape is one of important geometry element that describes error of parts. As one of error of shape, linearity effect directly precision, capability and quantity of instrument. At some situation, linearity is determinant indeed. Along with developing of science and technology, parts request more minimize and more precise, so that there is higher request to the measure of small size parts. Measure technique of small size part’s linearity and plan obtaining level is draggled. On the base, the task took instrument of small size part’s linearity as mostly researching object and researched on the measure theory.The article discuss mostly of researching to instrument of small size part’s linearity founded on air lubricated guide. First, it stated traditional measure means of linearity, as well as researching level on air lubricated guide inside and outside. Second, it probes into involved basic theory in the article (theory of air lubricated, assess means of linearity error). On the base, analyzing and demonstrating the feasibility and scientificity of the task analyzing and researching the measure elements and specialty of small size parts, as well as concretely requiring in fact, thereis a whole design frame about the instrument, moreover emphatic discussing air lubricated guide, driver and dealing with measure data with software. Finally, after experimenting with the instrument, we deal with and analyzed the data. Result indicates that the measure’s system of small size part’s linearity appeases measure’s request and collects automatically data and analysis image, which provide us a foundation on which we exploit instrument of small size part’s linearity.更多还原