【摘要】 介绍了实验室X射线衍射仪用横向梯度多层膜抛物面准直镜的的重要性。基于衍射仪性能要求，设计了横向梯度多层膜抛物面准直镜的面形曲线和多层膜结构。通过将行星运动磁控溅射系统与高速旋转掩模板技术结合，完成了横向梯度多层膜制备，实测周期与设计值的偏差小于±1%,CuKα线的反射率大于70%。采用环氧树脂复制法和光学直接加工法制作基底构成的准直镜全镜面形成的X射线束的发散度分别为0.475 mrad和0.164 mrad,其中前者在应用仪器上获得0.428 mrad的实测发散度，均已满足多方X射线衍射仪实用准直镜的需要。更多还原

【Abstract】 The importance of the collimated-beam mirror using parabolic curved graded multilayers for laboratory X-ray diffractometer is introduced. Based on the performance requirements of the diffractometer, the surface shape curve and multilayer film structure of the collimated-beam mirror are designed. By combining the planetary motion magnetron sputtering system with high-speed rotating mask technology, the parabolic curved graded multilayers are fabricated. The deviation between the measured period and the design value is less than ±1%, and the reflectivity of the Cu Kα line is greater than 70%. The divergence angles of the X-ray beam formed by the full collimating mirror surface with epoxy replicated substrate and optical polished substrate are 0.475 mrad and 0.164 mrad, respectively; and the former obtains a measured divergence angle of 0.428 mrad in the application instrument. All the values can meet the requirement of the collimating mirror for X-ray diffractometers.更多还原