【摘要】 大气压介质阻挡放电（APDBD）由于其在大面积上均匀、温和地产生活性组分而引起了人们的广泛关注。然而，在不同的放电模式下，等离子体的活性组分浓度、电子激发温度和密度等特性尚不清楚。本研究提出“电压-流量协同调控机制”,系统探究氦APDBD等离子体中电子参数与放电模式的演化规律，旨在为工业级等离子体源设计提供理论支持。实验采用环-环电极、管式DBD反应器，通过发射光谱分析与电学诊断，解析活性粒子浓度及电子参数动态特性。研究发现，大气压氦介质阻挡放电等离子体中主要活性粒子包括激发态氦原子He I、氢原子H_α、氧原子O I、羟基OH（A-X）、氮分子离子N⁺₂（B-X）、激发态氮分子N₂（C-B）和N₂（B-A）。采用玻尔兹曼斜率法和H_α谱线Stark展宽对等离子体电子激发温度（T_e）和电子密度（n_e）进行诊断，揭示放电模式与电子参数的耦合机制表现为三阶段演化：控制氦气流量0.5 SLM,低电压区间（9～11 kV）,氦APDBD表现为均匀放电模式时，随输入电压增大，电子激发温度缓慢上升，增幅为56%,电子密度呈下降趋势，降幅为36%;中电压区间（11～15 kV）,非对称丝状放电模式时，电子激发温度、电子密度迅速上升，增幅分别为983%和221%;高电压区间（15～18 kV）,为对称丝状放电模式时，电子激发温度迅速降低，降幅达79%,而电子密度保持相对平衡。此外，电子激发温度随氦气流量增加而降低，电子密度随氦气流量增大保持相对平衡。研究显示，输入电压调控可实现等离子体放电模式的转换，而协同氦气流量可调控电子激发温度，为大气压等离子体在材料制备、改性和生物医学等应用领域的参数优化提供了协同调控的方式。更多还原

【Abstract】 Atmospheric pressure dielectric barrier discharge（APDBD） has attracted significant interest in various fields as a result of its gentle and uniform generation of active species over a large surface area. However, the plasma characteristics, such as active species concentration, electron excitation temperature, and density, during different discharge modes are not clearly understood. In this study, a “voltage-flow co-control mechanism” is proposed to systematically explore the evolution of electronic parameters and discharge modes in helium APDBD plasma, aiming to provide theoretical support for the design of industrial-grade plasma sources. In this experiment, a ring-ring DBD reactor was utilized to investigate the dynamic characteristics of active particle concentration and electronic parameters using emission spectrum analysis and electrical diagnosis technology. It is found that the main active particles in atmospheric helium dielectric barrier discharge plasma include excited helium atom He I, hydrogen atom Hα, oxygen atom O I, hydroxyl OH（A-X）, nitrogen molecule N⁺₂（B-X）, excited nitrogen molecule N₂（C-B）, and N₂（B-A）. The Boltzmann slope method and Hα line Stark broadening were used to diagnose the electron excitation temperature（T_e） and electron density（n_e） of the plasma. It was found that the coupling mechanism between the discharge mode and the electronic parameters showed three stages of evolution: At a helium gas flow rate of 0.5 SLM and low voltage range of（9～11kV）, APDBD demonstrated a uniform discharge mode with a 56% increase and 36% decrease in electron excitation temperature and density respectively. When the voltage was increased to medium range（11～15 kV）, asymmetric filament discharge mode was observed with 983% and 221% increase in electron excitation temperature and density respectively. In the symmetrical filamentous discharge mode, the electron excitation temperature decreases rapidly by up to 79%, while the electron density remains in dynamic equilibrium. In addition, the electron excitation temperature decreases with the increase of helium flow, and the electron density maintains dynamic equilibrium with the increase of the flow rate. It is found that the input voltage control can realize the conversion between plasma discharge modes, and the helium flow rate can independently regulate the electron excitation temperature, providing a dual-dimensional collaborative control mode for optimizing the parameters of atmospheric pressure plasma in material preparation, modification, and biomedical applications.更多还原