【摘要】 针对传统湿度传感器存在测量范围窄、响应时间长和稳定性差等问题，开发了一种基于石墨相氮化碳（g-C₃N₄）与TiO₂复合材料的聚酰亚胺（PI）基底电容式柔性湿度传感器。通过扫描电镜（SEM）分析了g-C₃N₄/TiO₂复合材料的多孔结构和形态特性，并采用饱和盐溶液法对g-C₃N₄/TiO₂柔性湿度传感器在不同湿度下的湿敏性能、湿滞特性、响应和恢复速率等进行测试。结果表明，g-C₃N₄/TiO₂柔性湿度传感器具有相对湿度检测范围宽（0%～97%）、湿度迟滞低（1.48%）、响应时间短（3.5 s）等优势，可实现人体呼吸频率、呼吸强度以及比奥呼吸、潮式呼吸、睡眠暂缓呼吸等模式的检测。更多还原

【Abstract】 Traditional humidity sensors have the problems of narrow measurement range, long response time and poor stability. In this paper, a capacitive humidity sensor based on graphitic carbon nitride（g-C₃N₄） and TiO₂ composite is fabricated on the flexible PI substrate. The porous structural and morphological properties of the g-C₃N₄/TiO₂ composite are analyzed by scanning electron microscope（SEM）. The properties of humidity sensitivity, hysteresis, response and recovery rate for the flexible humidity sensor are tested under different humidity conditions and by using saturated salt solution method. The results showed that the g-C₃N₄/TiO₂ composite thin film humidity sensor has a wide relative humidity detection range（0%～97% RH）, low humidity hysteresis（1.48%）, and short response time（3.5 s）, which can achieve detection of human respiratory rate, respiratory intensity, as well as modes such as bio respiration, tidal respiration and sleep apnea.更多还原