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基于压电陶瓷泡沫的加速度传感器研究

Accelerometer based on niobium-doped lead zirconate titanate piezoelectric ceramic foam

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【作者】 王颖达; 赵全亮; 盛天宇; 张萌颖; 张怀文; 王兴涛; 何广平;

【Author】 WANG Ying-da;ZHAO Quan-liang;Sheng Tian-yu;ZHANG Meng-ying;Zhang Huai-wen;WANG Xing-tao;HE Guang-ping;School of Mechanical and Materials Engineering,North China Univ.of Tech.;CNPC Engineering Technology R&D Company Limited;College of Engineering and Technology, Zunyi Normal University;

【通讯作者】 赵全亮;

【机构】 北方工业大学机械与材料工程学院; 中国石油集团工程技术研究院有限公司; 遵义师范学院工学院;

【摘要】 传统压电材料的低柔性与高压电性能具有相互制约的关系,限制了压电式加速度传感器的性能。因此,为了调和这种矛盾,利用聚氨脂泡沫作为模版制备了一种具有三维互连结构的Nb0.02-Pb(Zr0.6Ti0.4)O3(PNZT)压电陶瓷泡沫,并利用其设计和制作了一种压电式加速度传感器,实验测试了加速度频率响应、动态响应和灵敏度等特性。实验结果表明,该加速度传感器的灵敏度约为0.4mV/g,线性度可达99.4%。

【Abstract】 The low flexibility and high piezoelectricity properties of traditional piezoelectric materials are mutually restricted, which limits the performance of piezoelectric acceleration sensors. Therefore, in order to reconcile this contradiction, a kind of Nb0.02-Pb(Zr0.6Ti0.4)O3(PNZT) piezoelectric ceramic foam with a three-dimensional interconnection structure was prepared using polyurethane foam as a template. A piezoelectric accelerometer is designed and fabricated by this kind of PNZT foam. The characteristics of frequency response, dynamic response and sensitivity to acceleration were tested experimentally. The experimental results show that the sensitivity of the acceleration sensor is about 0.4mV/g, and the linearity can reach 99.4%.

【基金】 北方工业大学有组织科研项目(110051360023XN278-11,2023YZZKY12);遵义市红花岗区科技计划项目(2022-09);遵义师范学院服务地方产业革命项目(2022-01);遵义师范学院“2023年学术新苗培养及创新探索项目”培育项目(2023-01-03)
  • 【文献出处】 功能材料与器件学报 ,Journal of Functional Materials and Devices , 编辑部邮箱 ,2023年05期
  • 【分类号】TQ174.1;TP212
  • 【下载频次】31
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