【摘要】 采用响应曲面法,以材料去除率R_MRR和表面粗糙度R_a为评价指标,研究抛光过程中抛光盘转速、压力、时间等3种参数对R_MRR和R_a的影响。根据抛光试验结果,建立材料去除率和表面粗糙度的回归模型,得出其响应曲面和等高线图,并进行详细分析。结果表明:回归模型较显著,证明了响应曲面法预测及优化304不锈钢化学机械抛光工艺参数的可行性及可靠性;据此得出R_a和R_MRR优化后的最佳工艺参数;R_a和R_MRR的试验值与预测值比较,相对误差在±10%以内,表明响应曲面得到的模型精度高,可用于化学机械抛光工艺参数优化与结果预测。更多还原

【Abstract】 Response surface methodology was used to study the effects of three parameters（rotating speed, pressure and time） on material removal rate R_MRR and surface roughness R_a in polishing process. According to the results of polishing test, the regression model of material removal rate and surface roughness was established, the response surface and contour map were obtained, and analyzed in detail. The results show that the regression model is significant, which proves the feasibility and reliability of the response surface method to predict and optimize the process parameters of 304 stainless steel chemical mechanical polishing. The optimum process parameters of surface roughness and material removal rate were obtained. The experimental values of R_a and R_MRR were compared with the predicted values, and the relative error was within ±10%. The results show that the precision of the model is high, and it can be used to optimize the process parameters and predict the results.更多还原