【摘要】 纳米计量技术能够为超精密加工技术提供纳米级位移和三维形貌,在纳米技术中扮演着重要角色.纳米计量标准包括台阶、膜厚、光栅及线宽等,用来校准现场条件下的纳米测量仪器.为了解纳米计量标准的发展现状与趋势,分析了台阶、膜厚、光栅以及线宽等纳米计量标准的国内外现状、国际比对情况和发展趋势,对实现解决测量仪器的溯源性,建立国际单位制下的纳米计量体系做出了相应工作.随着一个技术节点到下一个技术节点,为保证测量仪器的准确度,需要开展更小尺寸下纳米计量标准和测量方法的研究.更多还原

【Abstract】 Nanometering technology can provide nanometer-scale displacement and three-dimensional topography for ultra-precision processing technology, and plays an important role in nanotechnology. Nanometering standards mainly include steps, film thickness, grating and line width, etc., which are used to calibrate nanometer measuring instruments under field conditions. In order to understand the development status and trend of nanometric standards, the domestic and international status, international comparison and development trends of nanometric standards are analyzed, which include steps, film thickness, grating and line width, etc., and corresponding work has been done to realize the traceability of measuring instruments and establish a nanometric system under the international unit system. From one technology node to the next, studies of nanometering standards and measurement methods at smaller sizes are needed to ensure the accuracy of the measurement instrument.更多还原