【摘要】 金丝键合通常由金丝球超声键合完成。短尾是金丝球键合过程中一个典型的失效模式,详细分析了金丝球键合过程中第二点键合的四个关键步骤,分析了第二点键合形貌形成过程,分别研究了键合第二点各个区域与键合劈刀的位置关系,在此基础上详细分析了造成第二点键合金丝短尾的主要因素和机理,提出劈刀上升前后两种主要的短尾模式,得出键合参数是影响键合质量和键合强度的关键因素,给出了优化改进措施,提出通过降低超声功率和压力,或者通过优化原材料、劈刀,以便使用较低的工艺参数就可以完成键合,解决第二点键合短尾问题。更多还原

【Abstract】 Gold wire bonding is usually completed by ultrasonic bonding of gold wire balls. ShortTail is a typical failure mode in the bonding process. The four key steps of the second point bonding in the process are analyzed in detail. The formation process of the second point bonding morphology is analyzed. The positional relationship between each region of the second point bonding and the bonding cleaver is studied respectively. On this basis, the main factors and mechanisms that cause the short tail of the second point bonding alloy wire are analyzed in detail. Two main short tail modes before and after the riving knife rises are put forward. It is concluded that the bonding parameters are the key factors affecting the bonding quality and bonding strength. Optimization and improvement measures are given. It is suggested that the bonding can be completed by reducing the ultrasonic power and pressure or by optimizing the raw materials and riving knife so as to use lower process parameters to solve the short tail problem of the second point bonding.更多还原