【摘要】 以自制的纳米ITO气化粉为原料,采用注浆成型工艺制备了不同SnO₂含量的ITO靶材,并采用不同烧结温度对SnO₂含量为10%（质量分数）的靶材进行了烧结,通过SEM分析了不同SnO₂含量ITO靶材的组织及第二相在靶材中的数量、形貌、分布。结果表明,在1 575℃烧结温度下,随着SnO₂含量的增加,靶材晶粒得到细化,晶界交汇处第二相数量明显增多;当烧结温度提高至1 600℃时,晶界处第二相发生分解,并向母相中转移。采用王水对1 575℃烧结的SnO₂含量为10%的靶材进行腐蚀,提取第二相,并通过EDS、XRD、TEM、TGA分析了第二相的组分、物相结构及热重情况。研究表明,10%SnO₂含量ITO靶材晶界交汇处形成的第二相为六方结构的In₄Sn₃O₁₂,且靶材的氧含量与In₄Sn₃O₁₂有关。通过对不同SnO₂含量ITO靶材在密度、电阻率和热扩散系数方面的分析,间接研究了第二相对靶材性能的影响,发现SnO₂含量的增加有利于靶材密度的提高,同时使靶材电阻率增大、氧含量增高、热扩散系数减小。更多还原

【Abstract】 ITO target materials with different SnO₂ content were prepared by injection molding using self-made nano ITO gasification powder as raw mate-rial. The target materials with 10%（mass fraction） SnO₂ content were sintered at different sintering temperatures. The microstuctuer of ITO target materials with different SnO₂ content and the quantity, morphology and distribution of the second phase in the target materials were analyzed by SEM. The results show that at the sintering temperature of 1 575 ℃, with the increased SnO₂ content, the target grains were refined, and the number of the second phase at the intersection of grain boundaries was significantly increased; as the sintering temperature increased to 1 600 ℃, the second phase at the boundary decomposed and transfered to the parent phase. The target with 10% SnO₂ content sintered at 1 575 ℃ was corroded by aqua regia to extract the second phase. The composition, phase structure and thermogravimetry of the second phase were analyzed by EDS, XRD, TEM and TGA. The research indicates that the second phase formed at the intersection of grain boundary of ITO target with 10% SnO₂ content is the hexagonal In₄Sn₃O₁₂ phase, and the oxygen content of target is related to In₄Sn₃O₁₂. Based on the analysis of density, resistivity and thermal diffusivity of ITO target with different SnO₂ content, the influence of the second phase on the target performance was indirectly studied. It was found that the increase of SnO₂ content was beneficial to the increase of target density, while the increase of target resistivity, the increase of oxygen content and the decrease of thermal diffusivity.更多还原