【摘要】 为将环境中存在的振动噪声能量收集并转换为适用微电子系统的能源。采用PZT—5H压电片设计一种悬臂梁式能量采集装置,并对压电振子的前三阶模态和振型以及尺寸因数进行有限元分析,搭建实验台对其能量采集效率进行实验研究。结果表明:压电振子固有频率与长度成反比,与其厚度和宽度成正比;当系统一阶固有频率和外界激励频率相等或者接近时,能量采集效率将达到最大。可通过改变压电振子固有频率来更好地匹配外界振动源,从而提高能量采集效率,为设计给微机电系统供电的压电能量采集装置提供理论依据。更多还原

【Abstract】 For the purpose of collecting and converting vibration and noise energy existing in the environment into energy suitable for microelectronic system. A cantilever beam energy acquisition device is designed by using PZT—5 H piezoelectric plate,and the first three modes,mode shapes and size factors of the piezoelectric vibrator are analyzed by finite element method,an experimental bench is built for experimental research on its energy acquisition efficiency. The results show that the natural frequency of piezoelectric vibrator is inversely proportional to its length and directly proportional to its thickness and width. When the first-order natural frequency of the system is equal to or close to the external excitation frequency,the energy acquisition efficiency will reach the maximum. By changing the natural frequency of the piezoelectric vibrator,the external vibration source can be better matched,thus improving the energy acquisition efficiency and providing theoretical basis for designing the piezoelectric energy acquisition device to supply power to the MEMS.更多还原