【摘要】 为实现纳米级的定位精度,通过精密控制电机定/动子间的正压力和相对运动速度,以实现电机在一个周期内的精密步进运动。首先,在研究电机步进运动原理的基础上,设计了具有法向振动框特征的驱动足结构,可以获得驱动端法向振动和切向振动的独立解耦特性;其次,利用有限元法对定子驱动足进行了参数优化设计,获得了定子驱动足的主要结构尺寸;最后,制作电机样机并进行了定子振动特性实验和电机特性实验。定子振动特性实验结果表明:该电机在1～400Hz范围内能够使得驱动阶段和回程阶段具有不同的运动特性,上述两个运动阶段的动子运动位移差即为电机的运动步距,因而该电机具有更小的位移分辨率。机械输出特性实验结果表明:该电机在1～400Hz范围内分别具有微、纳米级步进运动特性,在1～30Hz内电机的位移分辨率最高可达11nm。综上,该电机在400Hz以内能实现微纳米定位精度,电机速度最高可达63.3μm/s。更多还原

【Abstract】 The non-resonant friction-driven linear piezoelectric motors have the advantages of structural simplicity and good running stability,but they can only obtain micron-level positioning accuracy.In order to achieve the nano-level positioning accuracy,the precise stepping motion of the motor is realized by precisely controlling the positive pressure and relative speed between the motor stator and mover.Firstly,on the basis of studying the principle of stepping motion of the motor,the driving foot with the characteristics of normal vibration frame is is designed for independent decoupling of normal vibration and tangential one at the driving end.Then,the finite element method is employed to optimize the parameters of the stator′s driving foot,and the main structural dimensions of the stator driving foot are determined.Finally,the motor prototype is fabricated and the vibration characteristics of the motor stator and the mechanical characteristics of the motor system are experimentally investigated.The experimental results of the stator′s vibration characteristics show that the motor can make different driving characteristics in the driving phase and the return phase in the range of 1～400 Hz.The difference of the moving displacement of the motion in the above two motion phases is the motor step,which results in a smaller displacement resolution.The experimental results of the mechanical output characteristics show that the motor has micro-and nanostepping motion characteristics in the range of 1～400 Hz,and the displacement resolution of the motor is up to 11 nm in 1～30 Hz.In summary,the motor can achieve micro-nano positioning accuracy within400 Hz and the maximum motor velocity is up to 63.3μm/s.更多还原