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Enhancement of off-state characteristics in junctionless field effect transistor using a field plate

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【作者】 王斌张鹤鸣胡辉勇史小卫

【Author】 Bin Wang;He-Ming Zhang;Hui-Yong Hu;Xiao-Wei Shi;State Key Discipline Laboratory of Wide Bandgap Semiconductor Technology,School of Advanced Materials and Nanotechnology, Xidian University;State Key Discipline Laboratory of Wide Bandgap Semiconductor Technology, School of Microelectronics,Xidian University;

【机构】 State Key Discipline Laboratory of Wide Bandgap Semiconductor Technology,School of Advanced Materials and Nanotechnology, Xidian UniversityState Key Discipline Laboratory of Wide Bandgap Semiconductor Technology, School of Microelectronics,Xidian University

【摘要】 In this paper, a novel junctionless field effect transistor(JLFET) is proposed. In the presence of a field plate between gate and drain, the gate-induced drain leakage(GIDL) effect is suppressed due to the decrease of lateral band-to-band tunneling probability. Thus, the off-state current Ioff, which is mainly provided by the GIDL current, is reduced. Sentaurus simulation shows that the Ioffof the new optimized JLFET is reduced by ~ 2 orders and its sub-threshold swing can reach76.8 mV/decade with little influence on its on-state current Ion, so its Ion/Ioff ratio is improved by 2 orders of magnitude compared with that of the normal JLFET. Optimization of device parameters such as Φfps(the work difference between field plate and substrate) and LFP(the length of field plate), is also discussed in detail.

【Abstract】 In this paper, a novel junctionless field effect transistor(JLFET) is proposed. In the presence of a field plate between gate and drain, the gate-induced drain leakage(GIDL) effect is suppressed due to the decrease of lateral band-to-band tunneling probability. Thus, the off-state current Ioff, which is mainly provided by the GIDL current, is reduced. Sentaurus simulation shows that the Ioffof the new optimized JLFET is reduced by ~ 2 orders and its sub-threshold swing can reach76.8 mV/decade with little influence on its on-state current Ion, so its Ion/Ioff ratio is improved by 2 orders of magnitude compared with that of the normal JLFET. Optimization of device parameters such as Φfps(the work difference between field plate and substrate) and LFP(the length of field plate), is also discussed in detail.

【基金】 supported by the National Natural Science Foundation of China(Grant No.61704130);the Fundamental Research Funds for the Central Universities,China(Grant No.20101166085);the Opening Project of Key Laboratory of Microelectronic Devices&Integrated Technology from Institute of Microelectronics,Chinese Academy of Sciences(Grant No.90109162905)
  • 【文献出处】 Chinese Physics B ,中国物理B , 编辑部邮箱 ,2018年06期
  • 【分类号】TN386
  • 【下载频次】31
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