【摘要】 采用激光化学气相沉积法在（100）取向Al₂O₃衬底上制备了第二代高温超导YBa₂Cu₃O_7-δ（YBCO）薄膜,研究了前驱体Y（DPM）3、Ba（DPM）2、Cu（DPM）2的蒸发温度对YBCO薄膜成分的影响规律。通过X射线衍射、扫描电子显微镜、背散射电子显微镜对薄膜进行了表征。结果表明:制备的YBCO薄膜样品成分中含有以下化合物:YBCO、CuYO₂、Cu₂O、Cu₄O₃、Y₂O₃、CuO、CuBaO₂、BaY2O₄、Ba₂Cu₃O_x。在激光功率为130 W,沉积温度为1 123 K,腔体压强为1 kPa,前驱体蒸发温度分别为TY=453 K、TBa=603 K和TCu=453 K的条件下制得成分较单一的c-轴取向YBCO薄膜。同时结果表明载流气Ar气的流速对薄膜成分存在一定影响。更多还原

【Abstract】 The YBa₂Cu₃O_7-δ（YBCO）thin films of the second generation high temperature superconductor were prepared on（100）-oriented Al₂O₃ substrates by laser chemical vapor deposition. Influences of the evaporationtemperatures of precursors[Y（DPM）3,Ba（DPM）2 and Cu（DPM）2]on composition of YBCO film was studied.The films were characterized by X-ray diffraction,scanning electron microscopy and backscattered electronmicroscopy. And the results showed that the film samples contained the compounds of YBCO,CuYO₂,Cu₂O,Cu₄O₃,Y₂O₃,CuO,CuBaO₂,BaY₂O₄ and Ba₂Cu₃O_x. Relatively pure c-axis-oriented YBCO films were prepared atlaser power of 130 W,deposition temperature of 1 123 K,total pressure of 1 kPa and precursors evaporation temperatures of TY=453 K,TBa=603 K,TCu=453 K respectively. Simultaneously,the components of YBCO films were influenced by the velocity of carrier gas Ar.更多还原