【摘要】 强震观测中记录的加速度时程是城市大型建筑抗震设计的重要依据,为城市抗震设防提供可靠的数据支持。因此,对加速度计在稳定性、线性度、动态范围和直流响应等性能方面有着很高的要求。提出利用静电力反馈控制技术与传感器技术相结合形成闭环力平衡式MEMS加速度计,使之具有良好的低频特性。并采用四阶ΣΔ调制器完成低噪声信号采样,确保其动态范围高于140 d B,完全满足现有强震观测规范对该项指标的要求。更多还原

【Abstract】 Acceleration time histories recordedin strong motion observation is an important basis data for seismic design of large buildings in cities,and can provide reliable data support for seismic fortification of cities. Therefore,the accelerometer has high requirements in terms of stability,linearity,dynamic range and DC response. In this paper,an MEMS accelerometer with closed-loop force balance was developed by combining electrostatic force feedback control technology and sensor technology,so that ithas good low-frequency characteristics. The fourth-order ΣΔmodulator is used to sample the low-noise signal to ensure that the dynamic range ofthe accelerometeris higher than140 dB,which fully meets the requirements of the existing strong motion observation standard.更多还原