【摘要】 利用离子液体前驱体热解工艺,选取Al₂O₃作为基体制备碳基薄膜,对比了不同热解温度条件下所制碳基薄膜的表面形貌、结构特征以及摩擦学性能,探究了离子液体热解法制备碳基薄膜的最佳热解温度。利用X射线衍射分析仪、X射线光电子能谱和扫描电子显微镜对碳基薄膜的结构和表面形貌进行分析,并考察薄膜的摩擦学性能。结果表明:热解温度对薄膜成分和内应力具有较大影响,薄膜成分和内应力则影响薄膜表面形貌和摩擦学性能,最佳热解温度为1000℃。更多还原

【Abstract】 Based on the pyrolysis of ionic liquid precursor,the carbon films were prepared on Al₂O₃ substrate.The surface morphology,structure and tribological properties of carbon films prepared at different pyrolysis temperatures were compared,and the optimum pyrolysis temperature were investigated.The films were analyzed by Xray diffraction analyzer（XRD）,X-ray photoelectron spectroscopy（XPS）and scanning electron microscope（SEM）.The results showed that the pyrolysis temperature had great influence on the composition and internal stress of film,and the composition and internal stress affected the surface morphology and tribological properties of films.The optimum pyrolysis temperature was about 1000℃.更多还原