【摘要】 MEMS谐振器采用阵列耦合设计可以降低运动电阻、提高功率处理能力等,但是阵列耦合谐振器的性能对于耦合梁结构特性非常敏感,据此分析工艺误差造成的耦合梁形状变化对圆盘阵列耦合谐振器滤波性能的影响。对耦合梁不同程度倾斜下的谐振滤波器结构和性能参数进行理论分析,并采用有限元仿真软件ANSYS进行模拟仿真。结果表明当耦合梁分别发生0.1°、0.2°、0.5°倾斜时,滤波器中心频率分别下偏10×10^-6、24×10-6、51×10-6。当倾斜角达到0.5°时,分数带宽偏差将达到5.6%。提出了一种半高耦合梁的圆盘阵列谐振滤波器,其滤波器性能稳定性要4×优于常规型圆盘耦合谐振滤波器。更多还原

【Abstract】 MEMS resonator array has the advantages of reducing the motion resistance and improving the power handling capability,however the performance of the coupled array is very sensitive to the structural characteristics of the coupling beam. Therefore,the influence of shape of the coupling beam caused by fabrication error on disk resonatorbased filter is analyzed. The structural and performance parameters of the resonator-based filter under different inclination angle of the coupling beam are theoretically analyzed and simulated by ANSYS. The results show that the center frequency varies 10×10-6,24×10-6 and 51 × 10^-6 respectively,when the inclination angle reaches 0.1°,0.2°and 0.5° respectively. And when the inclination angle reaches 0.5°,the fractional band-width deviation will reach5.6%. A resonator-based filter coupled by semi-high-type coupling beam is proposed,which is 4 ×better than conventional disk resonator-based filter with regard to stability.更多还原