【摘要】 利用阳极氧化方法制备了高度有序的TiO₂纳米管阵列,采用化学还原AgNO3在纳米管表面均匀沉积了Ag纳米颗粒以形成Ag/TiO₂/Ti（MSM）结构的紫外探测器,并通过SEM和EDS对形成的TiO₂-Ag纳米管进行形貌表征和成分分析。通过测试不同光照强度、不同偏压下的电压-电流（I-V）和电流-时间（I-t）曲线,研究了MSM结构在紫外光下的光电特性。实验发现,在偏压为1V、光照强度为1.04mW/cm2的375nm紫外光照射下,基于TiO₂-Ag肖特基结的紫外探测器光电流可达46.9μA,响应度为0.21A/W,外量子效率（EQE）为70.8%。研究结果表明,Ag负载的TiO₂纳米管阵列具有良好的紫外探测性能。更多还原

【Abstract】 Highly ordered TiO₂ nanotube arrays were fabricated by anodic oxidation method.Uniformly dispersed Ag nanoparticles were successfully loaded on surface of the TiO₂ nanotube arrays through a chemical reduction AgNO3 method and MSM ultraviolet detector with Ag/TiO₂/Ti structure was fabricated.TiO₂-Ag nanotube arrays were characterized by SEM and EDS.The photoelectric performance was investigated by testing voltage-current and current-time curves under different light intensity and different bias.The results show that its photocurrent,responsivity and EQE are 46.9μA,0.21 A/W and 70.8%respectively under 1 Vbias voltage and375 nm ultraviolet with a light intensity of 1.04 mW/cm2.The results indicate that Ag-loaded TiO₂ nanotube arrays have good UV detection performance.更多还原