【摘要】 通过溶胶-凝胶法、离子束磁控溅射法和化学腐蚀法分别制备了PZT薄膜、PbZr_0.52Ti_0.48O₃/Ni（PZT/Ni）复合薄膜材料的鼓包样品。采用X射线衍射仪（X-ray diffraction,XRD）表征了PZT/Ni复合薄膜材料的物相结构;利用自主研制的多功能新型鼓包测试平台,在力场、电场、磁场作用下分别测试分析了PZT/Ni复合薄膜材料体系的力电磁耦合性能。结果表明:随着电场强度的增加,PZT薄膜的弹性模量E先增大后减小;PZT/Ni复合薄膜在电场作用下实现了电磁调控,矫顽磁场强度Hc提高了33.4%;随着测试平台油压的增大,PZT薄膜的剩余极化强度和矫顽场分别增加了17.1%和32.1%,PZT/Ni复合薄膜的矫顽磁场强度提高了46.1%。更多还原

【Abstract】 PZT and PZT/Ni thin film materials were prepared by sol-gel method,ion beam magnetron sputtering method,and chemical etching method.Mechanical-electrical-magnetic properties of PZT/Ni film were measured by self-developed bugle test system.The structure of PZT/Ni film was examined by XRD.It was found that the elastic modulus of PZT film firstly increased and then gradually decreased with the increasing of applied electric field.The corresponding magnetic coercive field increased of 33.4%.With the increase of the oil pressure,the residual polarization and coercive field of PZT thin films increased of 17.1% and 32.1%,respectively.The magnetic coercivity field of PZT/Ni composite films increased of 46.1%.更多还原