【摘要】 为提升Na_0.5Bi_0.5TiO₃-K_0.5Bi_0.5TiO₃（NBT-KBT）系无铅压电陶瓷压电性能,开发新型无铅压电叠层驱动器,该文采用单因素方差分析与正交试验设计方法优化研究了0.8NBT-0.2KBT压电陶瓷的极化工艺,最优极化工艺为极化电场6kV/mm,极化温度70℃,极化时间50 min,保压时间21 min,测得压电系数d33达到108pC/N;制备了无铅陶瓷叠层驱动器,并基于三角放大原理和柔性铰链结构设计一种新型外置放大机构,分别对有无外置放大机构的叠层驱动器微位移量进行对比测试,结果表明,与有外置放大机构的叠层驱动器相比,直接驱动的叠层驱动器位移量放大了3.7倍,在150V驱动电压下位移量达到25μm。这种无铅压电陶瓷驱动器具有大位移量、稳定性及低成本等特性,有望应用于微精密定位系统领域。更多还原

【Abstract】 To promote the performance of NBT-KBT lead-free piezoelectric ceramics and develop new lead-free piezoelectric stack actuators,the polarizing process of 0.8NBT-0.2KBT piezoelectric ceramics has been studied by the mono factor analysis of variance and the orthogonal test.The results showed that the piezoelectric constant d33 reached to 108pC/N with the poling field of 6kV/mm and temperature of 70 ℃for the poling time of 50 mins and holding time of 21 mins.A lead-free piezoelectric stack actuator with a new type of external displacement magnifying mechanism was fabricated on the basis of triangle amplification principle and flexure hinge structure.The results showed that the displacement of the directively driving stack actuator has been magnified 3.7times and the remarkable displacement of 25μm was achieved under a driving voltage of 150 Vcomparing with the stack actuator with external displacement magnifying mechanism.The lead-free piezoelectric ceramic stack actuator has the features of large displacement,good stability and low-cost,and will start a new scope of application to the micro-precision positioning system.更多还原