【摘要】 采用尿素高温分解产生的氧化性气氛在氢化锆表面制备多元复合膜层。利用XRD、SEM、EDS、XPS、AES等分析测试手段对氢化锆表面膜层的相结构、截面形貌、元素成分及价态进行性能表征。物相分析结果表明膜层主要有氧化锆相和Zr N相,且氧化锆相由单斜相（m-ZrO₂）和四方相（t-ZrO₂）组成。扫描电镜形貌分析表明原位生长氧化物膜层致密,膜层与氢化锆基体结合紧密。俄歇电子能谱结果表明膜层由C、N、O、Zr元素组成,并具有明显的分层现象,膜层由外向内分为富（C/N）层及富O层,随膜层表面溅射时间增加,O、Zr元素相对含量明显增加,C、N元素相对含量明显降低。X射线光电子能谱分析表明多元复合膜层存在Zr-O、Zr-C、Zr-N-O、Zr-N、O-H等键。更多还原

【Abstract】 Multi-component coatings on zirconium hydride were manufactured by gas-solid reaction.The oxidizing atmosphere was generated by urea decomposed into complicated chemical compound at high temperature.The phase structures,microstructure,elements depth profiles and binding energies of multi-component coatings were analyzed by XRD,SEM,AES and XPS,respectively.XRD shows the phase structure of the coatings consists mainly of Zr N and ZrO₂,including monoclinic ZrO₂（m-ZrO₂） and tetragonal ZrO₂（t-ZrO₂）.SEM depicts the coatings are formed densely and combined tightly.AES indicates the coatings are composed of carbon,nitrogen,oxygen and zirconium elements,and outside-in distribution is carbon-nitrogen-enriched layer and oxygen-enriched layer.Meanwhile the atomic concentration of carbon and nitrogen decreases,while oxygen and zirconium increases continuously with increasing the sputtering time.XPS spectrum reveals coatings contain Zr-O,Zr-C,Zr-N-O,Zr-N and O-H bonds.更多还原