【摘要】 为解决有机/无机杂化材料薄膜厚度较薄且难加工等问题,设计并制作了一种基于加载条形光波导结构的MZI(Mach-Zehnder Interferometer)型快速、低功耗热光开关器件。聚合物材料具有较低的热导率和较大的热光系数,能有效降低器件的功耗,以热导率相对较大的Si O2的衬底作为下包层,可有效加快器件响应时间。采用热光系数较大的有机/无机杂化材料DR1/Si O2-Ti O2作为波导芯层,以聚甲基丙烯酸甲酯和甲基丙烯酸环氧丙酯的共聚物(P(MMA-GMA):Poly-Methyl-Methacrylate-Glycicly-Methacrylate)作为加载条波导,以聚甲基丙烯酸甲酯(PMMA:Polymethyl Methacrylate)作为波导上包层,设计了热光开关器件。采用COMSOL软件模拟了器件的光场和热场分布,采用微加工工艺并结合光漂白技术进行了开关器件的制备。并在1 550 nm工作波长下测试开关器件的性能。可在缩短器件响应时间的同时降低器件的功耗,驱动功率为9.2 m W,消光比为21.2 d B,开关的上升、下降时间分别为152.8μs和180.0μs。更多还原

【Abstract】 To solve the problem of that the organic/inorganic material has a thinner film and is difficult to process,we design and fabricate a polymeric MZI（ Mach-Zehnder Interferometer） TO（ Thermo-Optic） switch based on strip-loaded waveguide structure. The polymer materials have the advantages of lower thermal conductivity and larger thermo-optical coefficient,and can reduce the power-consumption of the TO device effectively. The SiO₂ is used as the under-cladding which can shorten the response time of the device. We selected the organic/inorganic hybrid material DR1/SiO₂-TiO₂ as the core layer,the P（ MMA-GMA）（ PolyMethyl-Methacrylate-Glycicly-Methacrylate） as the loading strip, and poly methyl methacrylate（ PMMA:Polymethyl Methacrylate） as the upper-cladding. The light field and thermal field distribution of the TO switch are both simulated. The TO switch is fabricated by using the microfabrication process and photobleaching technology. At 1 550 nm wavelength,the power consumption is about 9. 2 m W,and the extinction ratio of the device is 21. 2 d B. The rise/fall times of the switch are 152. 8 μs/180. 0 μs,respectively.更多还原