【摘要】 设计了一种新型微气体传感器的结构,并利用有限元分析软件ANSYS对该传感器的基底和电极进行了分析与优化。结果得出:传感器的基底设计为硅杯状基座结构,且在Si O₂绝缘层与硅基座之间另加了Si导热层和Si O₂保护层,加热电极宽度和间距分别为50μm和60μm,此时微传感器的中心工作区域可获得高且均匀的温度分布,同时中心区域的磁感应强度值极小,有利于传感器整体性能的提高。更多还原

【Abstract】 A novel structure was designed for micro gas sensor,and the substrate and electrode structures of the micro gas sensor were analyzed and optimized by using finite element analysis tool. The results show that when the substrate of the sensor is designed as silicon cup structure,silicon layer of thermal conductivity and protective layer of Si O₂ being sandwiched between the insulating layer of Si O₂ and silicon pedestal,and the heating electrode width and spacing are 50 μm and 60 μm,the centre area of the sensor can obtain high and uniform temperature distribution,at the same time the minimum magnetic flux density value is found in the center region of the sensor,which is helpful to improve the whole performance of the sensor.更多还原