【摘要】 以含有腔体结构的LTCC叠层生瓷为研究对象,介绍了腔体在层压形变的评价和控制方法。分析了LTCC空腔在层压时产生变形的主要影响因素。阐述了在生瓷表面上增加金属掩模板来控制腔体形变的叠层结构设计。有限元分析结果表明不锈钢掩模可使腔体边缘应变降低至无掩模时应变的1/6,并通过工艺试验验证了金属掩模板的有效性。结果表明合理的层压结构设计和恰当的层压工艺可以制作出满足尺寸精度的空腔结构。更多还原

【Abstract】 In the paper, the evaluation and control method of cavity deformation occurred during LTCC green tape lamination process is introduced. By analyzing the factors affecting the deformation in the laminating process, an architectural design is proposed to control the cavity deformation by adding the metal mask on the surface of the green tape. The finite element analysis results show that the stainless steel mask reduces the strain at the edge of the cavity to 1/6 that of the original. The method of using metal mask plate is verified by technological tests. The paper then concludes that requested LTCC cavity is obtainable through reasonable laminating structure design and appropriate technological parameter.更多还原