【摘要】 为解决激光诱导击穿光谱系统中光谱检测模块体积大、分辨率低的问题,设计了一种小体积、高分辨率的交叉型Czerny-Turner光纤光谱仪.计算了光学系统的结构参量和光学元件的特征参量.运用光学设计软件Zemax对光学系统进行分析与评价,结果表明该光谱仪在340~440nm光谱范围内分辨率优于0.1nm,系统体积约为200mm×180mm×60mm.此外,搭建了一套激光诱导击穿光谱实验系统,通过对重金属溶液的分析检测,获得良好的实验结果,整个系统分辨率高、体积小、成本低、结构简单、稳定性好.更多还原

【Abstract】 In order to solve the problems of the existing spectrum detection module in Laser-Induced Breakdown Spectroscopy(LIBS)system,such as low resolution and large size,based on the optical design theory,a small size,and high resolution crossed Czerny-Turner spectrometer was designed.Parameters of the structure and optical elements were calculated.The performance analysis and evaluation of the optical system were carried out by using optical design Zemax software.The results show that the optical system whose effective wavelength range is from 340 nm to 440 nm with resolution better than 0.1nm,and its size was 200 mm×180 mm×60 mm.In addition,in order to verify performance of the spectrometer,the heavy metal solution was detected with the LIBS system.The experimental results demonstrate that it has various advantages,such as high spectral resolution,small size,low cost,simple structure,and good stability.更多还原