【摘要】 多孔硅由于其制备方法简单、拥有极大的内表面积、广泛的孔径尺寸、可控的表面改性以及与传统硅集成技术兼容等特点,成为传感器件中理想的敏感材料。简述了多孔硅电化学传感器和光学传感器的研究进展,包括多孔硅湿度传感器、多孔硅气敏传感器、多孔硅有机蒸气传感器、多孔硅生物传感器。最后指出了阻碍多孔硅基传感器商业化的影响因素,并展望了多孔硅传感器的发展方向。更多还原

【Abstract】 The motivation of using porous silicon(PS)as a sensing material relates to ease of fabrication,large internal surface,wide range of accessible and adjustable pore size,controllable surface modification and compatibility with current silicon-based technologies.Based on PS materials,the research progress of PS electrochemical sensors and optical sensors are introduced,including PS humidity sensors,PS gas sensors,PS organic vapor sensors,PS biological sensors.Lastly,concluding remarks about existing challenges that hinder the commercial use of the material are highlighted,and pospective development directions of PS sensors are suggested.更多还原