【摘要】 精密气浮运动平台系统是一个涉及机、电、气的多领域耦合系统,针对其多领域耦合特性和气体轴承承载非线性建模问题,基于Modelica技术和Fluent建立了气浮运动平台的联合仿真计算方法。分别建立气浮运动平台系统Modelica模型和气体轴承流场Fluent模型,实时传递气体轴承气动力载荷和位姿信息,得到了更加准确的气膜压力和气膜高度的函数关系。运用此联合仿真模型对驱动合力偏离运动部件质心导致的偏转振动进行了仿真分析,结果表明:驱动合力偏心会引起平台较大程度偏转。更多还原

【Abstract】 Ultra-precision motion stage system is a multiple-field coupling system involving mechanical,electrical,magnetic and pneumatic. For its multi-field coupling characteristics and nonlinearity of the characteristics of hydrostatic air bearings,the co-simulation method of ultra-precision motion system based on M odelica and Fluent was build. The M odelica model of ultra-precision motion stage and Fluent model of air bearing has been established respectively,by real-time transmission of position and aerodynamic load,the co-simulation of ultra-precision motion stage was realized. Using this co-simulation model the deflection vibraion caused by non-colinearity of the direction of driving resultant force from the center of mass was calculated and analyzed. The results showthat the motion stage will vibrate substantially when driving force deviates from the center of mass.更多还原