【摘要】 采用NaClO和IPA体系对单晶硅各向异性腐蚀制备绒面.通过紫外可见光光度计和扫描电镜对硅绒面的反射率、形貌进行了表征.结果表明,当NaClO为10%(质量分数,下同),IPA为5%,腐蚀温度为80℃,腐蚀时间为15 min时,能够得到均匀单晶硅绒面,硅片平均反射率达15%左右;与传统的Na OH/IPA腐蚀体系相比,该工艺制得的单晶硅绒面结构反射率低,有利于太阳能电池性能的提高.更多还原

【Abstract】 A novel anisotropic etching process based on a composition of sodium hypochlorite(NaClO) /isopropyl alcohol(IPA) was used to etch the surface of single crystal wafer silicon for solar cells.The surface structure and reflectance were characterized by UV-visible spectroscopy and.scanning electron microscope The results suggested that a uniform pyramid structure could be formed and the average reflection of surface was about 15% under 10% NaClO(in mass,the same below) /3% IPA solution at 80 ℃ for 15 min.Compared with wafers fabricated with the traditional industrial process of Na OH / IPA,we obtained wafers with lower reflectance which can improve the performance of solar energy cells.更多还原