【摘要】 针对两个直线电机驱动的以气浮平台和两个旋转台为主要运动单元的四轴抛光系统,利用多体系统理论,建立了同时考虑位置误差和方向误差的综合误差模型。运用激光干涉仪对气浮平台各单项几何误差和旋转台的定位误差进行测量。对测量结果分析发现,气浮平台定位误差没有明显的线性增加或减小的趋势,竖直直线度大于定位误差和水平直线度,与传统滚珠丝杠驱动的运动平台误差相比有很大的不同。通过将试验与理论相结合的定量研究,得到了在气浮平台单项几何误差及其相互之间的垂直度误差共同影响下的两轴联动工况下综合误差的位置和方向分量,发现气浮平台综合误差竖直方向的分量很显著,揭示了气浮平台产生几何误差的原因,为抛光平台的几何误差补偿提供了理论依据。更多还原

【Abstract】 The volumetric error of a four-axis polishing platform with two aerostatic stages driven by linear motors and two rotational stages is modeled considering both position error and direction error by multi-body system theory.The individual geometric errors of the motion parts are measured by laser interferometer.The measuring results indicate that,for aerostatic stage,the position error shows neither linear increasing nor decreasing trend;the vertical straightness is larger than the position error and the vertical st4 aightness,which is obviously different from the errors of traditional ball screw driven platform.The position component and direction component of the volumetric error of the resultant motion of two linear axes are investigated theoretically and experimentally considering the comprehensive influence of the individual geometric errors of the aerostatic stages.It is found that the vertical component of the volumetric error of the aerostatic stage is obvious.The causes of the geometric errors of the aerostatic stages are revealed,which provides the theoretical basis for geometric error compensation of the polishing platform.更多还原