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The influence of the channel electric field distribution on the polarization Coulomb field scattering in AlN/GaN heterostructure field-effect transistors

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【作者】 于英霞林兆军吕元杰冯志红栾崇彪杨铭王玉堂

【Author】 Yu Yingxia;Lin Zhaojun;Lü Yuanjie;Feng Zhihong;Luan Chongbiao;Yang Ming;Wang Yutang;School of Physics,Shandong University;Scienceand Technologyon ASIC Laboratory,Hebei Semiconductor Research Institute;

【机构】 School of Physics,Shandong UniversityScienceand Technologyon ASIC Laboratory,Hebei Semiconductor Research Institute

【摘要】 Based on the measured capacitance–voltage(C–V) curves and current–voltage(I–V) curves for the prepared differently-sized AlN/GaN heterostructure field-effect transistors(HFETs), the I–V characteristics of the AlN/GaN HFETs were simulated using the quasi-two-dimensional(quasi-2D) model. By analyzing the variation in the electron mobility for the two-dimensional electron gas(2DEG) with the channel electric field, it is found that the different polarization charge distribution generated by the different channel electric field distribution can result in different polarization Coulomb field(PCF) scattering. The 2DEG electron mobility difference is mostly caused by the PCF scattering which can reach up to 899.6 cm2/(V·s)(sample a), 1307.4 cm2/(V·s)(sample b),1561.7 cm2/(V s)(sample c) and 678.1 cm2/(V·s)(sample d), respectively. When the 2DEG sheet density is modulated by the drain–source bias, the electron mobility for samples a, b and c appear to peak with the variation of the 2DEG sheet density, but for sample d, no peak appears and the electron mobility rises with the increase in the2 DEG sheet density.

【Abstract】 Based on the measured capacitance–voltage(C–V) curves and current–voltage(I–V) curves for the prepared differently-sized AlN/GaN heterostructure field-effect transistors(HFETs), the I–V characteristics of the AlN/GaN HFETs were simulated using the quasi-two-dimensional(quasi-2D) model. By analyzing the variation in the electron mobility for the two-dimensional electron gas(2DEG) with the channel electric field, it is found that the different polarization charge distribution generated by the different channel electric field distribution can result in different polarization Coulomb field(PCF) scattering. The 2DEG electron mobility difference is mostly caused by the PCF scattering which can reach up to 899.6 cm2/(V·s)(sample a), 1307.4 cm2/(V·s)(sample b),1561.7 cm2/(V s)(sample c) and 678.1 cm2/(V·s)(sample d), respectively. When the 2DEG sheet density is modulated by the drain–source bias, the electron mobility for samples a, b and c appear to peak with the variation of the 2DEG sheet density, but for sample d, no peak appears and the electron mobility rises with the increase in the2 DEG sheet density.

【基金】 supported by the National Natural Science Foundation of China(No.11174182);the Specialized Research Fund for the Doctoral Program of Higher Education(No.20110131110005)
  • 【文献出处】 Journal of Semiconductors ,半导体学报(英文版) , 编辑部邮箱 ,2014年12期
  • 【分类号】TN386
  • 【下载频次】37
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