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直流脉冲偏压协同射频等离子体对PET膜的表面改性

Surface Modification of Polyethylene Terephthalate Membrane by DC Pulse-Biased Exposure of RF Plasma

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【作者】 解艳凤施芸城黄晓江石建军郭颖

【Author】 Xie Yanfeng;Shi Yuncheng;Huang Xiaojiang;Shi Jinjun;Guo Ying;College of Science,Donghua University;

【机构】 东华大学理学院

【摘要】 利用协同射频等离子体对聚对苯二甲酸乙二醇酯(PET)膜进行表面改性,主要研究了直流(DC)脉冲偏压协同作用对PET膜表面快速(15 s)处理效果的影响。实验表明:DC脉冲偏压作用后PET表面润湿性得到了明显的改善,接触角可在15 s的处理时间内降到20°。改性后的PET与Au膜的剥离力比未处理样品提升了近6倍。场发射扫描电镜测试结果发现,薄膜表面刻蚀现象明显,表面粗糙程度增加。经过X射线光电子能谱分析表明,改性后的PET表面生成了大量的含氧极性官能团,使得表面含氧量有了很大的提高。结果表明DC脉冲偏压可快速有效地提高PET膜表面粗糙程度和含氧官能团数量,进而影响其亲水性和表面黏结性,为进一步改善等离子体表面改性工艺提供了依据。

【Abstract】 The surfaces of polyethylene terephthalate( PET) membrane were modified by exposure of DC pulse-biased RF plasma. The impacts of the surface modification conditions,including the plasma exposure time,D C pulse,and temperature on its hydrophilicity and cohesiveness were evaluated. The modified PET surfaces were characterized with X-ray photoelectron spectroscopy,field emission scanning electron microscopy,and the conventional surface probes. The results show that the plasma exposure strongly affected the PET microstructures and properties. For example,a plasma exposure for 15 s reduced its water contact angle to 20°,and increased the adhesion at the interface of gold film and PET substrate by 6 times,possibly because of formation of increased numbers of oxygen-containing,polar functional groups on the roughened PET surfaces.

【基金】 国家自然科学基金青年科学基金(11005017)
  • 【文献出处】 真空科学与技术学报 ,Chinese Journal of Vacuum Science and Technology , 编辑部邮箱 ,2013年09期
  • 【分类号】O53;TB306
  • 【被引频次】5
  • 【下载频次】201
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