【摘要】 为了实现微拉伸测试系统中微位移的精密进给,首先设计了一种压电陶瓷微驱动器,然后在LabVIEW平台上利用PID控制算法对其进行了闭环控制。控制后的微驱动器输出精度达到10 nm,响应时间较开环时缩短了近10倍,明显改善了输出特性并达到了线性输出的目的。最后将该驱动器应用于搭建的微拉伸测试系统,对SU-8光刻胶薄膜进行了微尺度力学性能测试,测得SU-8光刻胶薄膜的杨氏模量为(1.47±0.27)GPa,抗拉强度为(62.18±16.49)MPa,最大应变为(3.57±1.4)%。该驱动器基本满足了微拉伸测试的需要。更多还原

【Abstract】 In order to achieve an accurate feed of micro-displacement in micro-tensile testing system,a piezoelectric actuator was designed firstly,and then the PID closed-loop algorithm coded on LabVIEW platform was adopted to improve its output characteristics and achieve the linear output.The controlled actuator had an output accuracy of 10 nm and its response time was reduced nearly 10 times compared with the open-loop actuator.Finally the piezoelectric actuator was applied to a self-made micro-tensile testing system,and mechanical properties of SU-8 photoresist film was measured by this testing system,obtaining its Young’s modulus of(1.47±0.27)GPa,fracture strength of(62.18±16.49)MPa and maximum strain of(3.57±1.4)%.This piezoelectric actuator can be used to realize the micro-tensile testing.更多还原