【摘要】 简述了TiAlN涂层的应用领域、氧化机理以及采用磁控溅射制备该涂层的方法,分析了制备过程中N2分压、Al靶功率以及基体温度对涂层抗氧化性能的影响规律。同时指出了致密、膜基结合力高的涂层具有较高的抗氧化性;加入其他合适元素和合理设计过渡层不仅可以提高涂层与基体的物理匹配程度,减小内应力,同时也可提高膜基结合力,改善涂层的热力学稳定性及抗氧化性能,将成为今后的研究趋势。更多还原

【Abstract】 The application,oxidation mechanism and magnetron sputtering method of TiAlN coatings are summarized.The processing parameters of magnetron sputtering deposited TiAlN coatings,including nitrogen flow rate,Al target power and substrate temperature,have significant effects on the oxidation resistance of TiAlN coatings.The coatings with compact structure and film adhesion have high oxidation resistance.Addition of other elements and design of transition layer in TiAlN coatings can not only improve the physical compatibility and reduce the internal stress,but also improve the film adhesion,enhance the thermodynamic stability and oxidation resistance of the coating,which will become the research trend in the future.更多还原