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Photoluminescence of silicone oil treated by fluorocarbon plasma

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【作者】 陈天； 叶超； 袁颖； 邓艳红； 葛水兵； 徐轶君； 宁兆元； 潘小平； 王振明；

【Author】 Chen Tian a) , Ye Chao a) , Yuan Ying a) , Deng Yan-Hong a) , Ge Shui-Bin a) , Xu Yi-Jun a) , Ning Zhao-Yuan a) , Pan Xiao-Pingb) , and Wang Zhen-Ming b) a) School of Physics, Science and Technology, Jiangsu Key Laboratory of Thin Films, Soochow University, Suzhou 215006, China b) Joint Research Laboratory of Jiemei Biomedical Engineering Instrument, Soochow University, Suzhou 215006, China

【机构】 School of Physics, Science and Technology, Jiangsu Key Laboratory of Thin Films, Soochow University； Joint Research Laboratory of Jiemei Biomedical Engineering Instrument, Soochow University；

【摘要】 We investigated photoluminescence characteristics of silicone oils treated by C2F6 and CHF3 plasma. The silicone oil treated by the C2F6 plasma emitted a white light mainly composed of 415 nm, 469 nm, and 554 nm emissions, while that treated by the CHF3 plasma emitted a pink light (415 nm). Fourier transformed infrared spectroscopy and Raman spectroscopy studies showed that the photoluminescence was correlated with the Si-C bond, the carbon-related defects and the oxygen vacancies. It was suggested that the light emitting at 554 nm was related to the Si-C bond and the carbon-related defects, while the pink emission at 415 nm was related to the oxygen vacancies.

【Abstract】 We investigated photoluminescence characteristics of silicone oils treated by C2F6 and CHF3 plasma. The silicone oil treated by the C2F6 plasma emitted a white light mainly composed of 415 nm, 469 nm, and 554 nm emissions, while that treated by the CHF3 plasma emitted a pink light (415 nm). Fourier transformed infrared spectroscopy and Raman spectroscopy studies showed that the photoluminescence was correlated with the Si–C bond, the carbon-related defects and the oxygen vacancies. It was suggested that the light emitting at 554 nm was related to the Si–C bond and the carbon-related defects, while the pink emission at 415 nm was related to the oxygen vacancies.

【关键词】 photoluminescence； fluorocarbon plasma； silicone oil；
【Key words】 photoluminescence； fluorocarbon plasma； silicone oil；
【基金】 Project supported by the National Natural Science Foundation of China (Grant Nos.10975105 and 11075114)
  • 【文献出处】 Chinese Physics B ,中国物理B , 编辑部邮箱 ,2012年09期
  • 【分类号】TN383.2
  • 【下载频次】16
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