【摘要】 采用任意拉格朗日—欧拉(ALE)描述建立了无阀微泵的静电-结构-流体全耦合三维模型,数值仿真表明:泵内流体的动态特性与泵膜的运动存在着密切的关系;扩散/收缩口单元两端的压力差必须达到一定值后才有"整流"泵送效用;泵腔内流体压力的分布几乎一致;流体流动的最大雷诺数远小于宏观条件下认定的临界雷诺数;流体黏滞损失的非线性不容忽视。更多还原

【Abstract】 A 3-Dimensional accurate analysis of the electrostatic valveless micropump involved in electrostatic dynamics,structural dynamics and fluid dynamics of the system.This was made by using multi-field coupled analysis.The results show that the dynamic characteristics of fluid in the micropump are dependent highly on the vibration of flexible membrane.The flow rectification function of the diffuser/nozzle element will work only after the pressure difference between the two ends of the element reaches a critical value.In the pump chamber,the fluidic press distribution almost independent of the depth variation.The maximum of Reynolds numbers is far less than the traditional critical Reynolds number.Due to the increasing demands for accuracy,the nonlinear features of viscous loss of the fluid can no longer be neglected or simplified,but have to be taken into account in detail.更多还原