【摘要】 为满足超精密表面形貌测量对工作台的大量程、超精密和三维扫描的要求,设计了一种新型三维精密工作台。工作台由自带计量系统的二维工作台和垂直扫描工作台组成。测量时闭环系统控制二维工作台的位移;同时,Z方向位移执行单元驱动垂直扫描工作台,实现了垂直方向上的精确定位。将研制的工作台与现有的位移传感器组合成表面形貌测量系统,对标准样板的粗糙度进行测量,其测量示值误差均在5%以内。结果表明,所设计的三维精密工作台能够满足使用要求。更多还原

【Abstract】 In order to satisfy the requirements of ultra-precision surface morphology measurement on workbench,e.g.wide range,ultra-precision and 3D scanning,a novel 3D precision workbench is designed.The workbench is composed of the 2D workbench with built-in metering system and the vertical scanning worktable.When measuring,the displacement of 2D workbench is controlled by closed-loop system;meanwhile the vertical scanning workbench is driven by the displacement execution unit on direction Z,for implementing precise positioning on the vertical direction.This workbench developed is combined with the existing displacement sensor to compose the surface morphology measurement system,and the roughness of the standard model is measured by this system,the error of the measurement value is within 5%.The result shows that this 3D precision workbench satisfies the operational requirements.更多还原