【摘要】 为了实现全面对IC装备以及装备功能仿真平台进行功能测试,通过分析装备命令响应特点,提出了包含单指令测试、逻辑指令序列测试以及随机指令序列测试的多模式测试方法;单指令测试验证设备以及由相关设备组成的系统的单指令响应正确性;逻辑指令序列从控制系统角度验证设备或系统的连续动态运行性能;随机指令序列测试验证设备或系统的动态随机响应性能;实际应用表明,提出的测试方法可以满足IC装备功能仿真平台的测试需求。更多还原

【Abstract】 In order to fully test IC manufacturing equipment and equipment functional simulation platform,a multi-mode test method including single command testing,logic sequence testing and random sequence testing was proposed.Single command testing is to test the command response correctness of device and system.Logic sequence is composed of five kinds of step types,which could realize the simple logic control.Logic sequence testing could test the continuous dynamic operation performance of device and system.Random sequence testing also test the dynamic operation performance through randomly send commands,to make sure device and system can operate normally in that case.Applications on IC manufacturing equipment functional simulation platform show that multi-mode test method is able to test the response correctness and dynamic operation performance of simulation platform.更多还原