节点文献
方形基片旋涂法镀疏水性二氧化硅减反膜(英文)
Spinning Sol-Gel Hydrophobic Silica Antireflective Coating on Square Substrates
【摘要】 在方形基片上通过旋涂法制备了疏水性膜层。研究了减小几何效应和伯努利效应对膜层均匀性的影响。结果表明,疏水性氧化硅溶胶具有良好的稳定性。疏水性氧化硅膜层即使不进行热处理也有良好的防潮性能。在室温下和超过90%相对湿度环境下的膜层透过率分别达到99.5%和99%,水接触角分别达到1 36°和139°。关于改性溶胶,刚制备完成测得的平均粒度是35.27 nm,放置50天后测得的平均粒度是37.15 nm。
【Abstract】 The paper discussed how to reduce the geometrical effect and Bernoulli Effect by spinning sol-gel hydrophobic coating on square substrates and eventually acquired ideal experiment results.Also,the paper concluded that hydrophobic silica sol possesses good stability.The hydrophobic silica antireflective coating has superiority on moisture-resistant property even without heat treatment.The transmission of the coating at room temperature and under the condition of the exceed 90%relative humidity reaches 99.5%and 99%,the contact angle of coating with water reaches 136° and 139°,respectively.About the modified sol,the average diameter of the silicon particles is 35.27 nm,and it is 37.15 nm which is measured 50 d later.
【Key words】 sol-gel; antireflective coating; hydrophobic property; spin coating;
- 【文献出处】 稀有金属材料与工程 ,Rare Metal Materials and Engineering , 编辑部邮箱 ,2012年S3期
- 【分类号】TB306
- 【被引频次】1
- 【下载频次】118