【摘要】 给出了一种新型的基于平面内谐振模态的电热驱动微悬臂梁的工作原理和制造方案。相比于传统的平面外谐振模态谐振式悬臂梁,该设计能有效地降低微悬臂梁在液体中工作时的拖曳力,从而降低其振动能量损失,使得其接入锁相环接口电路后的闭环品质因数达到了249。电热驱动和压阻检测方式便于工艺集成和快速检测。本文给出了基于SOI硅片和深反应离子刻蚀(DRIE)的悬臂梁制作方案,并分别在空气和水中对悬臂梁的谐振特性进行了测试。更多还原

【Abstract】 A high Q-factor(quality-factor)in-plane-mode resonant cantilever sensor is developed for real-time bio/chemical detection in liquids.With electrothermal excitation and piezoresistive frequency read-out integrated,the proposed sensor is realized by micromachining technology.The in-plane mode cantilever resonator can substantially decrease the liquid drag force,comparing to conventional out-of-plane resonance-mode cantilever,thereby,having achieved a much higher Q-factor of 249 when the cantilever is connected with a PLL(Phase-Lock-Loop)interface circuit in water.Fabrication processes based on SOI wafers and Deep-RIE has been presented.Resonant properties of the proposed microcantilever have been tested in air and water,respectively.更多还原